Evaluation of electromechanical properties and field concentrations near electrodes in piezoelectric thick films for MEMS mirrors by simulations and tests

Physics

• Mirrors 100%
• Zenith Tubes 66%
• Thick Films 66%
• Electric Fields 50%
• Piezoelectricity 50%
• Electrodes 33%
• Model 33%
• Microelectromechanical System 33%
• Responses 16%
• Simulation 16%
• Evaluation 16%
• Displacement 16%
• Finite Element Methods 16%

Engineering

• Piezoelectric 50%
• Electric Field 50%
• Concentration Field 33%
• Models 33%
• Nonlinear Behavior 16%
• Local Area 16%
• Experimental Investigation 16%
• Test Result 16%
• Measured Data 16%
• Displacement Response 16%
• Properties 16%
• Simulation 16%
• Determines 16%
• Evaluation 16%
• Measurer 16%
• Electromechanical Property 16%