Evaluation of electromechanical properties and field concentrations near electrodes in piezoelectric thick films for MEMS mirrors by simulations and tests

Fumio Narita; Yasuhide Shindo; Koji Sato

doi:10.1016/j.compstruc.2010.12.008

Evaluation of electromechanical properties and field concentrations near electrodes in piezoelectric thick films for MEMS mirrors by simulations and tests

Fumio Narita, Yasuhide Shindo, Koji Sato

Research output: Contribution to journal › Article › peer-review

11 Citations (Scopus)

Abstract

We examine the nonlinear electromechanical response of piezoelectric mirrors driven by PZT thick films in a combined numerical and experimental investigation. First, some electromechanical tests were performed to measure the response (displacement versus load, displacement versus electric field) of the PZT thick films on elastic layers. A finite element analysis was then employed to determine the material properties in the PZT thick films using measured data. Next, the mirror tilt angle and electromechanical field concentrations due to electrodes in piezoelectric mirrors under electric fields were analyzed by introducing a model for polarization switching in local areas, and a nonlinear behavior was discussed in detail. The mirrors consisted of four fully or partially poled PZT unimorphs. Test results on the mirror tilt angle versus electric field, which verify the model, were also presented.

Original language	English
Pages (from-to)	1077-1085
Number of pages	9
Journal	Computers and Structures
Volume	89
Issue number	11-12
DOIs	https://doi.org/10.1016/j.compstruc.2010.12.008
Publication status	Published - 2011 Jun

Keywords

Electromechanical field concentrations
Finite element method
MEMS
Material testing
Mesomechanics
Piezoelectric PZT thick films

ASJC Scopus subject areas

Civil and Structural Engineering
Modelling and Simulation
Materials Science(all)
Mechanical Engineering
Computer Science Applications

Access to Document

10.1016/j.compstruc.2010.12.008

Cite this

@article{5e487cd042a94140b9b8e2543756ad98,

title = "Evaluation of electromechanical properties and field concentrations near electrodes in piezoelectric thick films for MEMS mirrors by simulations and tests",

abstract = "We examine the nonlinear electromechanical response of piezoelectric mirrors driven by PZT thick films in a combined numerical and experimental investigation. First, some electromechanical tests were performed to measure the response (displacement versus load, displacement versus electric field) of the PZT thick films on elastic layers. A finite element analysis was then employed to determine the material properties in the PZT thick films using measured data. Next, the mirror tilt angle and electromechanical field concentrations due to electrodes in piezoelectric mirrors under electric fields were analyzed by introducing a model for polarization switching in local areas, and a nonlinear behavior was discussed in detail. The mirrors consisted of four fully or partially poled PZT unimorphs. Test results on the mirror tilt angle versus electric field, which verify the model, were also presented.",

keywords = "Electromechanical field concentrations, Finite element method, MEMS, Material testing, Mesomechanics, Piezoelectric PZT thick films",

author = "Fumio Narita and Yasuhide Shindo and Koji Sato",

note = "Funding Information: This work was supported by the Ministry of Education, Culture, Sports, Science and Technology of Japan under the Grant-in-Aid for Scientific Research (C). ",

year = "2011",

month = jun,

doi = "10.1016/j.compstruc.2010.12.008",

language = "English",

volume = "89",

pages = "1077--1085",

journal = "Computers and Structures",

issn = "0045-7949",

publisher = "Elsevier Limited",

number = "11-12",

}

TY - JOUR

T1 - Evaluation of electromechanical properties and field concentrations near electrodes in piezoelectric thick films for MEMS mirrors by simulations and tests

AU - Narita, Fumio

AU - Shindo, Yasuhide

AU - Sato, Koji

N1 - Funding Information: This work was supported by the Ministry of Education, Culture, Sports, Science and Technology of Japan under the Grant-in-Aid for Scientific Research (C).

PY - 2011/6

Y1 - 2011/6

N2 - We examine the nonlinear electromechanical response of piezoelectric mirrors driven by PZT thick films in a combined numerical and experimental investigation. First, some electromechanical tests were performed to measure the response (displacement versus load, displacement versus electric field) of the PZT thick films on elastic layers. A finite element analysis was then employed to determine the material properties in the PZT thick films using measured data. Next, the mirror tilt angle and electromechanical field concentrations due to electrodes in piezoelectric mirrors under electric fields were analyzed by introducing a model for polarization switching in local areas, and a nonlinear behavior was discussed in detail. The mirrors consisted of four fully or partially poled PZT unimorphs. Test results on the mirror tilt angle versus electric field, which verify the model, were also presented.

AB - We examine the nonlinear electromechanical response of piezoelectric mirrors driven by PZT thick films in a combined numerical and experimental investigation. First, some electromechanical tests were performed to measure the response (displacement versus load, displacement versus electric field) of the PZT thick films on elastic layers. A finite element analysis was then employed to determine the material properties in the PZT thick films using measured data. Next, the mirror tilt angle and electromechanical field concentrations due to electrodes in piezoelectric mirrors under electric fields were analyzed by introducing a model for polarization switching in local areas, and a nonlinear behavior was discussed in detail. The mirrors consisted of four fully or partially poled PZT unimorphs. Test results on the mirror tilt angle versus electric field, which verify the model, were also presented.

KW - Electromechanical field concentrations

KW - Finite element method

KW - MEMS

KW - Material testing

KW - Mesomechanics

KW - Piezoelectric PZT thick films

UR - http://www.scopus.com/inward/record.url?scp=79955575761&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=79955575761&partnerID=8YFLogxK

U2 - 10.1016/j.compstruc.2010.12.008

DO - 10.1016/j.compstruc.2010.12.008

M3 - Article

AN - SCOPUS:79955575761

VL - 89

SP - 1077

EP - 1085

JO - Computers and Structures

JF - Computers and Structures

SN - 0045-7949

IS - 11-12

ER -

Evaluation of electromechanical properties and field concentrations near electrodes in piezoelectric thick films for MEMS mirrors by simulations and tests

Abstract

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this