Evaluation of electromechanical properties and field concentrations near electrodes in piezoelectric thick films for MEMS mirrors by simulations and tests

Fumio Narita, Yasuhide Shindo, Koji Sato

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)

Abstract

We examine the nonlinear electromechanical response of piezoelectric mirrors driven by PZT thick films in a combined numerical and experimental investigation. First, some electromechanical tests were performed to measure the response (displacement versus load, displacement versus electric field) of the PZT thick films on elastic layers. A finite element analysis was then employed to determine the material properties in the PZT thick films using measured data. Next, the mirror tilt angle and electromechanical field concentrations due to electrodes in piezoelectric mirrors under electric fields were analyzed by introducing a model for polarization switching in local areas, and a nonlinear behavior was discussed in detail. The mirrors consisted of four fully or partially poled PZT unimorphs. Test results on the mirror tilt angle versus electric field, which verify the model, were also presented.

Original languageEnglish
Pages (from-to)1077-1085
Number of pages9
JournalComputers and Structures
Volume89
Issue number11-12
DOIs
Publication statusPublished - 2011 Jun 1

Keywords

  • Electromechanical field concentrations
  • Finite element method
  • MEMS
  • Material testing
  • Mesomechanics
  • Piezoelectric PZT thick films

ASJC Scopus subject areas

  • Civil and Structural Engineering
  • Modelling and Simulation
  • Materials Science(all)
  • Mechanical Engineering
  • Computer Science Applications

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