Abstract
Currently, it is required to develop lead-free piezoelectric thin film materials such as (K,Na)NbO3 (KNN) for a substitute of Pb(Zr,Ti)O3 (PZT). However, the material constants of a KNN film have not been reported yet. In this paper, some material constants of a KNN film are presented for the first time. We fabricated some piezoelectric resonators using a blanket KNN film by MEMS (micro electro mechanical systems) technology, and obtained the following material constants and related values; s11E = 9.27 pm2/N, s12E = -3.06 pm2/N, s66E = 24.7 pm2/N, c33E = 2.89 GPa, k312 = 0.06%, kt2 = 2.08%, d31 = -78.9 pC/N, Poison ratio σE = 0.33, and e33T/ε0 = 1.27×103. We also measured the velocities of leaky Lamb wave in a KNN diaphragm covered with Al using a line-focus-beam ultrasonic material characterization (LFB-UMC) system. Phase velocities of 1491 m/s and 5370-5180 m/s were measured for antisymmetric (A0) and symmetric (S0) modes of leaky Lamb wave, respectively. This is an important step to the determination of full material constants of the KNN film.
Original language | English |
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Title of host publication | 2015 IEEE International Ultrasonics Symposium, IUS 2015 |
Publisher | Institute of Electrical and Electronics Engineers Inc. |
ISBN (Print) | 9781479981823 |
DOIs | |
Publication status | Published - 2015 Nov 13 |
Event | IEEE International Ultrasonics Symposium, IUS 2015 - Taipei, Taiwan, Province of China Duration: 2015 Oct 21 → 2015 Oct 24 |
Other
Other | IEEE International Ultrasonics Symposium, IUS 2015 |
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Country | Taiwan, Province of China |
City | Taipei |
Period | 15/10/21 → 15/10/24 |
Keywords
- acoustic microscope
- bulk wave
- KNN film
- leaky Lamb wave
- material constants
ASJC Scopus subject areas
- Acoustics and Ultrasonics