Evaluation of acoustic properties of (K,Na)NbO3 film

Ryosuke Kaneko, Micho Kadota, Yuji Ohashi, Jun Ichi Kushibiki, Shinsuke Ikeuchi, Shuji Tanaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Currently, it is required to develop lead-free piezoelectric thin film materials such as (K,Na)NbO3 (KNN) for a substitute of Pb(Zr,Ti)O3 (PZT). However, the material constants of a KNN film have not been reported yet. In this paper, some material constants of a KNN film are presented for the first time. We fabricated some piezoelectric resonators using a blanket KNN film by MEMS (micro electro mechanical systems) technology, and obtained the following material constants and related values; s11E = 9.27 pm2/N, s12E = -3.06 pm2/N, s66E = 24.7 pm2/N, c33E = 2.89 GPa, k312 = 0.06%, kt2 = 2.08%, d31 = -78.9 pC/N, Poison ratio σE = 0.33, and e33T0 = 1.27×103. We also measured the velocities of leaky Lamb wave in a KNN diaphragm covered with Al using a line-focus-beam ultrasonic material characterization (LFB-UMC) system. Phase velocities of 1491 m/s and 5370-5180 m/s were measured for antisymmetric (A0) and symmetric (S0) modes of leaky Lamb wave, respectively. This is an important step to the determination of full material constants of the KNN film.

Original languageEnglish
Title of host publication2015 IEEE International Ultrasonics Symposium, IUS 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Print)9781479981823
DOIs
Publication statusPublished - 2015 Nov 13
EventIEEE International Ultrasonics Symposium, IUS 2015 - Taipei, Taiwan, Province of China
Duration: 2015 Oct 212015 Oct 24

Other

OtherIEEE International Ultrasonics Symposium, IUS 2015
Country/TerritoryTaiwan, Province of China
CityTaipei
Period15/10/2115/10/24

Keywords

  • acoustic microscope
  • bulk wave
  • KNN film
  • leaky Lamb wave
  • material constants

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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