Evaluation of acoustic properties of (K,Na)NbO3 film

Ryosuke Kaneko; Micho Kadota; Yuji Ohashi; Jun Ichi Kushibiki; Shinsuke Ikeuchi; Shuji Tanaka

doi:10.1109/ULTSYM.2015.0139

Evaluation of acoustic properties of (K,Na)NbO₃ film

Ryosuke Kaneko, Micho Kadota, Yuji Ohashi, Jun Ichi Kushibiki, Shinsuke Ikeuchi, Shuji Tanaka

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Currently, it is required to develop lead-free piezoelectric thin film materials such as (K,Na)NbO₃ (KNN) for a substitute of Pb(Zr,Ti)O₃ (PZT). However, the material constants of a KNN film have not been reported yet. In this paper, some material constants of a KNN film are presented for the first time. We fabricated some piezoelectric resonators using a blanket KNN film by MEMS (micro electro mechanical systems) technology, and obtained the following material constants and related values; s₁₁^E = 9.27 pm²/N, s₁₂^E = -3.06 pm²/N, s₆₆^E = 24.7 pm²/N, c₃₃^E = 2.89 GPa, k₃₁² = 0.06%, k_t² = 2.08%, d₃₁ = -78.9 pC/N, Poison ratio σ^E = 0.33, and e₃₃^T/ε₀ = 1.27×10³. We also measured the velocities of leaky Lamb wave in a KNN diaphragm covered with Al using a line-focus-beam ultrasonic material characterization (LFB-UMC) system. Phase velocities of 1491 m/s and 5370-5180 m/s were measured for antisymmetric (A₀) and symmetric (S₀) modes of leaky Lamb wave, respectively. This is an important step to the determination of full material constants of the KNN film.

Original language	English
Title of host publication	2015 IEEE International Ultrasonics Symposium, IUS 2015
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Print)	9781479981823
DOIs	https://doi.org/10.1109/ULTSYM.2015.0139
Publication status	Published - 2015 Nov 13
Event	IEEE International Ultrasonics Symposium, IUS 2015 - Taipei, Taiwan, Province of China Duration: 2015 Oct 21 → 2015 Oct 24

Other

Other	IEEE International Ultrasonics Symposium, IUS 2015
Country	Taiwan, Province of China
City	Taipei
Period	15/10/21 → 15/10/24

Keywords

acoustic microscope
bulk wave
KNN film
leaky Lamb wave
material constants

ASJC Scopus subject areas

Acoustics and Ultrasonics

Access to Document

10.1109/ULTSYM.2015.0139

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Evaluation of acoustic properties of (K,Na)NbO₃ film. / Kaneko, Ryosuke; Kadota, Micho; Ohashi, Yuji; Kushibiki, Jun Ichi; Ikeuchi, Shinsuke; Tanaka, Shuji.

2015 IEEE International Ultrasonics Symposium, IUS 2015. Institute of Electrical and Electronics Engineers Inc., 2015. 7329348.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Kaneko, R, Kadota, M, Ohashi, Y, Kushibiki, JI, Ikeuchi, S & Tanaka, S 2015, Evaluation of acoustic properties of (K,Na)NbO₃ film. in 2015 IEEE International Ultrasonics Symposium, IUS 2015., 7329348, Institute of Electrical and Electronics Engineers Inc., IEEE International Ultrasonics Symposium, IUS 2015, Taipei, Taiwan, Province of China, 15/10/21. https://doi.org/10.1109/ULTSYM.2015.0139

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abstract = "Currently, it is required to develop lead-free piezoelectric thin film materials such as (K,Na)NbO3 (KNN) for a substitute of Pb(Zr,Ti)O3 (PZT). However, the material constants of a KNN film have not been reported yet. In this paper, some material constants of a KNN film are presented for the first time. We fabricated some piezoelectric resonators using a blanket KNN film by MEMS (micro electro mechanical systems) technology, and obtained the following material constants and related values; s11E = 9.27 pm2/N, s12E = -3.06 pm2/N, s66E = 24.7 pm2/N, c33E = 2.89 GPa, k312 = 0.06%, kt2 = 2.08%, d31 = -78.9 pC/N, Poison ratio σE = 0.33, and e33T/ε0 = 1.27×103. We also measured the velocities of leaky Lamb wave in a KNN diaphragm covered with Al using a line-focus-beam ultrasonic material characterization (LFB-UMC) system. Phase velocities of 1491 m/s and 5370-5180 m/s were measured for antisymmetric (A0) and symmetric (S0) modes of leaky Lamb wave, respectively. This is an important step to the determination of full material constants of the KNN film.",

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AB - Currently, it is required to develop lead-free piezoelectric thin film materials such as (K,Na)NbO3 (KNN) for a substitute of Pb(Zr,Ti)O3 (PZT). However, the material constants of a KNN film have not been reported yet. In this paper, some material constants of a KNN film are presented for the first time. We fabricated some piezoelectric resonators using a blanket KNN film by MEMS (micro electro mechanical systems) technology, and obtained the following material constants and related values; s11E = 9.27 pm2/N, s12E = -3.06 pm2/N, s66E = 24.7 pm2/N, c33E = 2.89 GPa, k312 = 0.06%, kt2 = 2.08%, d31 = -78.9 pC/N, Poison ratio σE = 0.33, and e33T/ε0 = 1.27×103. We also measured the velocities of leaky Lamb wave in a KNN diaphragm covered with Al using a line-focus-beam ultrasonic material characterization (LFB-UMC) system. Phase velocities of 1491 m/s and 5370-5180 m/s were measured for antisymmetric (A0) and symmetric (S0) modes of leaky Lamb wave, respectively. This is an important step to the determination of full material constants of the KNN film.

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