Evaluation of a spherical aberration constant of the objective lens of HVEM at Tohoku University

Gyeong Su Park, Daisuke Shindo

    Research output: Contribution to journalReview articlepeer-review

    5 Citations (Scopus)

    Abstract

    A spherical aberration constant of the objective lens of a high-voltage electron microscope at Tohoku University (JEM-ARM1250) was evaluated by processing high-resolution electron microscope (HREM) images of an amorphous Ge thin film. The processing was carried out through a computer network system coupled with a highly efficient film scanner. From the intensity profiles of digital diffractograms of two HREM images, the spherical aberration constant of the objective lens (Cs) is estimated to be Cs = 1.74±0.10 mm and their defocus values are estimated to be about +77 nm and +118 nm, respectively.

    Original languageEnglish
    Pages (from-to)152-158
    Number of pages7
    JournalJournal of Electron Microscopy
    Volume45
    Issue number2
    DOIs
    Publication statusPublished - 1996

    Keywords

    • Digital diffractogram
    • Film scanner
    • High-resolution image
    • High-voltage electron microscope
    • Intensity profile

    ASJC Scopus subject areas

    • Instrumentation

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