Abstract
A spherical aberration constant of the objective lens of a high-voltage electron microscope at Tohoku University (JEM-ARM1250) was evaluated by processing high-resolution electron microscope (HREM) images of an amorphous Ge thin film. The processing was carried out through a computer network system coupled with a highly efficient film scanner. From the intensity profiles of digital diffractograms of two HREM images, the spherical aberration constant of the objective lens (Cs) is estimated to be Cs = 1.74±0.10 mm and their defocus values are estimated to be about +77 nm and +118 nm, respectively.
| Original language | English |
|---|---|
| Pages (from-to) | 152-158 |
| Number of pages | 7 |
| Journal | Journal of Electron Microscopy |
| Volume | 45 |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - 1996 Jan 1 |
Keywords
- Digital diffractogram
- Film scanner
- High-resolution image
- High-voltage electron microscope
- Intensity profile
ASJC Scopus subject areas
- Instrumentation
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Park, G. S., & Shindo, D. (1996). Evaluation of a spherical aberration constant of the objective lens of HVEM at Tohoku University. Journal of Electron Microscopy, 45(2), 152-158. https://doi.org/10.1093/oxfordjournals.jmicro.a023425