Evaluation of a spherical aberration constant of the objective lens of HVEM at Tohoku University

Gyeong Su Park, Daisuke Shindo

Research output: Contribution to journalReview article

5 Citations (Scopus)

Abstract

A spherical aberration constant of the objective lens of a high-voltage electron microscope at Tohoku University (JEM-ARM1250) was evaluated by processing high-resolution electron microscope (HREM) images of an amorphous Ge thin film. The processing was carried out through a computer network system coupled with a highly efficient film scanner. From the intensity profiles of digital diffractograms of two HREM images, the spherical aberration constant of the objective lens (Cs) is estimated to be Cs = 1.74±0.10 mm and their defocus values are estimated to be about +77 nm and +118 nm, respectively.

Original languageEnglish
Pages (from-to)152-158
Number of pages7
JournalJournal of Electron Microscopy
Volume45
Issue number2
DOIs
Publication statusPublished - 1996 Jan 1

Keywords

  • Digital diffractogram
  • Film scanner
  • High-resolution image
  • High-voltage electron microscope
  • Intensity profile

ASJC Scopus subject areas

  • Instrumentation

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