Evaluation and application of resist for alkaline wet etching

Tomokazu Takahashi, Mitsutoshi Makihata, Masayoshi Esashi, Shuji Tanaka

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Evaluation and application of resist for alkaline wet etching'. Together they form a unique fingerprint.

Engineering & Materials Science