EUV laboratory polarimetry and ellipsometry with a laser produced plasma source

Masaki Yamamoto, Minaji Furudate, Ko Mayama, Mihiro Yanagihara, Makoto Watanabe

Research output: Contribution to journalConference articlepeer-review

Abstract

The ellipsometer system consists of four vacuum chambers accommodating a continuum light source of a laser produced plasma driven by a Q-switched Nd:YAG laser, a concave focusing mirror, a constant-deviation angle monochromator, and a reflectometer chamber in which newly polarizing elements are installed. With the ellipsometer, a multilayer transmission phase shifter was evaluated by transmission ellipsometry. The amplitude transmittance Tp/Ts between p- and s- components were found, where the retardation angle of 80.7° is large enough for various polarimetry measurements. With the multilayer polarizers and the phase shifter, normalized Stokes parameters of the beam from the monochromator was measured, which showed that the beam is mostly unpolarized.

Original languageEnglish
Pages (from-to)104-105
Number of pages2
JournalConference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
Volume1
Publication statusPublished - 1997
EventProceedings of the 1997 10th IEEE Lasers and Electro-Optics Society Annual Meeting, LEOS. Part 2 (of 2) - San Francisco, CA, USA
Duration: 1997 Nov 101997 Nov 13

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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