Etching of various SiO2

Tatsuhiro Yabune, Masayuki Miyashita, Hirohisa Kikuyama, Jun Takano, Akinobu Teramoto

Research output: Chapter in Book/Report/Conference proceedingChapter

1 Citation (Scopus)
Original languageEnglish
Title of host publicationScientific Wet Process Technology for Innovative LSI/FPD Manufacturing
PublisherCRC Press
Pages153-155
Number of pages3
ISBN (Electronic)9781315221076
ISBN (Print)9780849335433
Publication statusPublished - 2016 Apr 19

ASJC Scopus subject areas

  • Physics and Astronomy(all)
  • Engineering(all)
  • Environmental Science(all)

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