Etch rate dependence on crystal orientation of lithium niobate

Andrew B. Randles, Masayoshi Esashi, Shuji Tanaka

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

This paper presents the etch rate of lithium niobate (LiNbO3) as a function of crystal orientation. Etching is a fundamental technology needed for the fabrication of new sensors, actuators, and other new devices. In this study, LiNbO3 spheres 30 mm in diameter were etched in hydrofluoric acid and a mixture of hydrofluoric and nitric acids at different temperatures and different times. The measured data of the etched sphere shape were processed and plotted, giving etch rate diagrams over the entire spheres. Based on the etch rate data obtained, the Wulff-Jaccodine method was used to predict the etched shape of 128° Y-cut and 155° Y-cut LiNbO3. The predicted etching profiles were compared with those obtained by experiments. A least-square polynomial fit for the data was also developed and was found to be useful in removing some of the variation in the measurements.

Original languageEnglish
Article number5611686
Pages (from-to)2372-2380
Number of pages9
JournalIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume57
Issue number11
DOIs
Publication statusPublished - 2010 Nov 1

ASJC Scopus subject areas

  • Instrumentation
  • Acoustics and Ultrasonics
  • Electrical and Electronic Engineering

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