Etch rate dependence on crystal orientation for lithium niobate

Andrew B. Randles, Shuji Tanaka, Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

This paper presents experimental data for the etch rate of lithium niobate (LiNbO3) as a function of crystal orientation. The etching characterization is a fundamental technology needed for the fabrication of new sensors, actuators or other new devices. In this study, 30 mm spheres of LiNbO3 were etched in hydrofluoric acid and in a solution of hydrofluoric and nitric acids, to determine the etch rate dependence on crystal orientation. It was found that the maximum etch rate was on the -Z face and the etching showed a three-fold symmetry about the Z axis. The Wulff-Jaccodine method as well as the data collected from the etched spheres were used to predict the etched shape of a wafer. The predicted shape agreed with that found during etching.

Original languageEnglish
Title of host publication2007 IEEE Ultrasonics Symposium Proceedings, IUS
Pages2119-2122
Number of pages4
DOIs
Publication statusPublished - 2007 Dec 1
Event2007 IEEE Ultrasonics Symposium, IUS - New York, NY, United States
Duration: 2007 Oct 282007 Oct 31

Publication series

NameProceedings - IEEE Ultrasonics Symposium
ISSN (Print)1051-0117

Other

Other2007 IEEE Ultrasonics Symposium, IUS
CountryUnited States
CityNew York, NY
Period07/10/2807/10/31

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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