Estimation of the thickness or composition of a covering layer on a solid by XPS or AES

Kichinosuke Hirokawa, Shigeru Suzuki, Kenji Abiko, Hiroshi Kimura, Masaoki Oku

Research output: Contribution to journalArticlepeer-review

18 Citations (Scopus)

Abstract

A method is proposed for semi-quantitative determination of the thickness or composition of a covering layer on a solid by XPS or by micro-AES using neither a series of standard samples nor argon-ion etching. In the case of XPS, the thickness or relative composition of the covering layer is calculated by means of the intensity ratio between one element and another in a specimen and using physical parameters such as inelastic mean free paths of electrons and photoionization cross-sections. In the case of AES, the physical parameters for the quantification can be eliminated by using the ratio of the relative intensity for two elements in the sample to that in a suitable, comparable reference.

Original languageEnglish
Pages (from-to)243-253
Number of pages11
JournalJournal of Electron Spectroscopy and Related Phenomena
Volume24
Issue number2
DOIs
Publication statusPublished - 1981

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Radiation
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Spectroscopy
  • Physical and Theoretical Chemistry

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