We investigated the in-situ average permeabilities of thin-film inductors regarding process damages, domain structure, local demagnetizing field and effective air gap in the inductor. It is estimated that the effective air gaps were most responsible for the values of the insitu permeabilities of a meander-coil type thin-film inductor with closed magnetic circuit.
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering