Estimation of the In-Situ Permeabilities in Thin-Film Inductors

M. Yamaguchi; S. Arakawa; S. Yabukami; K. I. Arai; F. Kumagai; S. Kikuchi

doi:10.1109/20.281139

Estimation of the In-Situ Permeabilities in Thin-Film Inductors

M. Yamaguchi, S. Arakawa, S. Yabukami, K. I. Arai, F. Kumagai, S. Kikuchi

Research output: Contribution to journal › Article

6 Citations (Scopus)

Abstract

We investigated the in-situ average permeabilities of thin-film inductors regarding process damages, domain structure, local demagnetizing field and effective air gap in the inductor. It is estimated that the effective air gaps were most responsible for the values of the insitu permeabilities of a meander-coil type thin-film inductor with closed magnetic circuit.

Original language	English
Pages (from-to)	3210-3212
Number of pages	3
Journal	IEEE Transactions on Magnetics
Volume	29
Issue number	6
DOIs	https://doi.org/10.1109/20.281139
Publication status	Published - 1993 Nov

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

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Yamaguchi, M., Arakawa, S., Yabukami, S., Arai, K. I., Kumagai, F., & Kikuchi, S. (1993). Estimation of the In-Situ Permeabilities in Thin-Film Inductors. IEEE Transactions on Magnetics, 29(6), 3210-3212. https://doi.org/10.1109/20.281139

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