Estimation of the In-Situ Permeabilities in Thin-Film Inductors

M. Yamaguchi, S. Arakawa, S. Yabukami, K. I. Arai, F. Kumagai, S. Kikuchi

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)


We investigated the in-situ average permeabilities of thin-film inductors regarding process damages, domain structure, local demagnetizing field and effective air gap in the inductor. It is estimated that the effective air gaps were most responsible for the values of the insitu permeabilities of a meander-coil type thin-film inductor with closed magnetic circuit.

Original languageEnglish
Pages (from-to)3210-3212
Number of pages3
JournalIEEE Transactions on Magnetics
Issue number6
Publication statusPublished - 1993 Nov

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering


Dive into the research topics of 'Estimation of the In-Situ Permeabilities in Thin-Film Inductors'. Together they form a unique fingerprint.

Cite this