## Abstract

A simple procedure for estimation of the N _{2} dissociation degrees in low-pressure, high-density plasmas is proposed. This procedure is applied to the estimation of the N _{2} dissociation in an N _{2} inductively coupled plasma and confirmed to give N _{2} dissociation degrees similar to those reported previously. The rf power and N _{2} pressure dependence of the N _{2} dissociation degree is also presented. The contribution of stepwise excitation out of N _{2} A ^{3}Σ _{u} ^{+} [N _{2}(A)] metastables to the N _{2} second positive emission is found to be negligible from the net excitation rate computed using an assumed cross section of the electron-impact excitation from N _{2}(A) to the N _{2}C ^{3}Π _{u} state and the N _{2}(A) number density deduced from a simple kinetic model. The recombination of N atoms on the inner surfaces of the plasma reactor used in this study is discussed briefly. Finally, the advantages of the N _{2} dissociation estimation by vacuum ultraviolet optical emission spectroscopy are mentioned.

Original language | English |
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Pages (from-to) | 2990-2995 |

Number of pages | 6 |

Journal | Journal of Applied Physics |

Volume | 92 |

Issue number | 6 |

DOIs | |

Publication status | Published - 2002 Sep 15 |

## ASJC Scopus subject areas

- Physics and Astronomy(all)