Estimation of dissociation degree of N 2 in an inductively coupled plasma by vacuum ultraviolet emission spectroscopy

Toshiki Nakano; Shinya Kumagai; Seiji Samukawa

doi:10.1063/1.1501741

Estimation of dissociation degree of N ₂ in an inductively coupled plasma by vacuum ultraviolet emission spectroscopy

Toshiki Nakano, Shinya Kumagai, Seiji Samukawa

Innovative Energy Research Center

Research output: Contribution to journal › Article › peer-review

29 Citations (Scopus)

Abstract

A simple procedure for estimation of the N ₂ dissociation degrees in low-pressure, high-density plasmas is proposed. This procedure is applied to the estimation of the N ₂ dissociation in an N ₂ inductively coupled plasma and confirmed to give N ₂ dissociation degrees similar to those reported previously. The rf power and N ₂ pressure dependence of the N ₂ dissociation degree is also presented. The contribution of stepwise excitation out of N ₂ A ³Σ _u ⁺ [N ₂(A)] metastables to the N ₂ second positive emission is found to be negligible from the net excitation rate computed using an assumed cross section of the electron-impact excitation from N ₂(A) to the N ₂C ³Π _u state and the N ₂(A) number density deduced from a simple kinetic model. The recombination of N atoms on the inner surfaces of the plasma reactor used in this study is discussed briefly. Finally, the advantages of the N ₂ dissociation estimation by vacuum ultraviolet optical emission spectroscopy are mentioned.

Original language	English
Pages (from-to)	2990-2995
Number of pages	6
Journal	Journal of Applied Physics
Volume	92
Issue number	6
DOIs	https://doi.org/10.1063/1.1501741
Publication status	Published - 2002 Sep 15

ASJC Scopus subject areas

Physics and Astronomy(all)

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10.1063/1.1501741

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@article{d16b0793d9934833993b0e3e0a3869de,

title = "Estimation of dissociation degree of N 2 in an inductively coupled plasma by vacuum ultraviolet emission spectroscopy",

abstract = "A simple procedure for estimation of the N 2 dissociation degrees in low-pressure, high-density plasmas is proposed. This procedure is applied to the estimation of the N 2 dissociation in an N 2 inductively coupled plasma and confirmed to give N 2 dissociation degrees similar to those reported previously. The rf power and N 2 pressure dependence of the N 2 dissociation degree is also presented. The contribution of stepwise excitation out of N 2 A 3Σ u + [N 2(A)] metastables to the N 2 second positive emission is found to be negligible from the net excitation rate computed using an assumed cross section of the electron-impact excitation from N 2(A) to the N 2C 3Π u state and the N 2(A) number density deduced from a simple kinetic model. The recombination of N atoms on the inner surfaces of the plasma reactor used in this study is discussed briefly. Finally, the advantages of the N 2 dissociation estimation by vacuum ultraviolet optical emission spectroscopy are mentioned.",

author = "Toshiki Nakano and Shinya Kumagai and Seiji Samukawa",

year = "2002",

month = sep,

day = "15",

doi = "10.1063/1.1501741",

language = "English",

volume = "92",

pages = "2990--2995",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics Publising LLC",

number = "6",

}

TY - JOUR

T1 - Estimation of dissociation degree of N 2 in an inductively coupled plasma by vacuum ultraviolet emission spectroscopy

AU - Nakano, Toshiki

AU - Kumagai, Shinya

AU - Samukawa, Seiji

PY - 2002/9/15

Y1 - 2002/9/15

N2 - A simple procedure for estimation of the N 2 dissociation degrees in low-pressure, high-density plasmas is proposed. This procedure is applied to the estimation of the N 2 dissociation in an N 2 inductively coupled plasma and confirmed to give N 2 dissociation degrees similar to those reported previously. The rf power and N 2 pressure dependence of the N 2 dissociation degree is also presented. The contribution of stepwise excitation out of N 2 A 3Σ u + [N 2(A)] metastables to the N 2 second positive emission is found to be negligible from the net excitation rate computed using an assumed cross section of the electron-impact excitation from N 2(A) to the N 2C 3Π u state and the N 2(A) number density deduced from a simple kinetic model. The recombination of N atoms on the inner surfaces of the plasma reactor used in this study is discussed briefly. Finally, the advantages of the N 2 dissociation estimation by vacuum ultraviolet optical emission spectroscopy are mentioned.

AB - A simple procedure for estimation of the N 2 dissociation degrees in low-pressure, high-density plasmas is proposed. This procedure is applied to the estimation of the N 2 dissociation in an N 2 inductively coupled plasma and confirmed to give N 2 dissociation degrees similar to those reported previously. The rf power and N 2 pressure dependence of the N 2 dissociation degree is also presented. The contribution of stepwise excitation out of N 2 A 3Σ u + [N 2(A)] metastables to the N 2 second positive emission is found to be negligible from the net excitation rate computed using an assumed cross section of the electron-impact excitation from N 2(A) to the N 2C 3Π u state and the N 2(A) number density deduced from a simple kinetic model. The recombination of N atoms on the inner surfaces of the plasma reactor used in this study is discussed briefly. Finally, the advantages of the N 2 dissociation estimation by vacuum ultraviolet optical emission spectroscopy are mentioned.

UR - http://www.scopus.com/inward/record.url?scp=18644383746&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=18644383746&partnerID=8YFLogxK

U2 - 10.1063/1.1501741

DO - 10.1063/1.1501741

M3 - Article

AN - SCOPUS:18644383746

VL - 92

SP - 2990

EP - 2995

JO - Journal of Applied Physics

JF - Journal of Applied Physics

SN - 0021-8979

IS - 6

ER -

Estimation of dissociation degree of N ₂ in an inductively coupled plasma by vacuum ultraviolet emission spectroscopy

Abstract

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