Estimation of dissociation degree of N 2 in an inductively coupled plasma by vacuum ultraviolet emission spectroscopy

Toshiki Nakano, Shinya Kumagai, Seiji Samukawa

Research output: Contribution to journalArticlepeer-review

29 Citations (Scopus)

Abstract

A simple procedure for estimation of the N 2 dissociation degrees in low-pressure, high-density plasmas is proposed. This procedure is applied to the estimation of the N 2 dissociation in an N 2 inductively coupled plasma and confirmed to give N 2 dissociation degrees similar to those reported previously. The rf power and N 2 pressure dependence of the N 2 dissociation degree is also presented. The contribution of stepwise excitation out of N 2 A 3Σ u + [N 2(A)] metastables to the N 2 second positive emission is found to be negligible from the net excitation rate computed using an assumed cross section of the electron-impact excitation from N 2(A) to the N 2C 3Π u state and the N 2(A) number density deduced from a simple kinetic model. The recombination of N atoms on the inner surfaces of the plasma reactor used in this study is discussed briefly. Finally, the advantages of the N 2 dissociation estimation by vacuum ultraviolet optical emission spectroscopy are mentioned.

Original languageEnglish
Pages (from-to)2990-2995
Number of pages6
JournalJournal of Applied Physics
Volume92
Issue number6
DOIs
Publication statusPublished - 2002 Sep 15

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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