Estimate on CO2 emissions reduction effects achieved by the adoption of a water spray humidification system to clean rooms

Uemura Satoshi, Kazuaki Iijima, Migaku Takahashi, Tadahiro Ohmi

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    We proposed water spray humidification in an indoor system for clean rooms used for the production of semiconductors and FPDs, and calculated the energy-saving effect and CO2 emission reduction effect of this system. As a result of estimate on annual energy consumption by air conditioning at model semiconductor factory, this system can be reduced heating load of 76% and CO2 emission of 0.23 ton-CO2/Year per volume of outside air of 1 m3/min.

    Original languageEnglish
    Title of host publication2007 International Symposium on Semiconductor Manufacturing, ISSM - Conference Proceedings
    Pages164-167
    Number of pages4
    DOIs
    Publication statusPublished - 2007 Dec 1
    Event16th Annual 2007 International Symposium on Semiconductor Manufacturing, ISSM - Santa Clara, CA, United States
    Duration: 2007 Oct 152007 Oct 17

    Other

    Other16th Annual 2007 International Symposium on Semiconductor Manufacturing, ISSM
    CountryUnited States
    CitySanta Clara, CA
    Period07/10/1507/10/17

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Industrial and Manufacturing Engineering
    • Electrical and Electronic Engineering

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