Abstract
We proposed water spray humidification in an indoor system for clean rooms used for the production of semiconductors and FPDs, and calculated the energy-saving effect and CO2 emission reduction effect of this system. As a result of estimate on annual energy consumption by air conditioning at model semiconductor factory, this system can be reduced heating load of 76% and CO2 emission of 0.23 ton-CO2/Year per volume of outside air of 1 m3/min.
Original language | English |
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Title of host publication | 2007 International Symposium on Semiconductor Manufacturing, ISSM - Conference Proceedings |
Pages | 164-167 |
Number of pages | 4 |
DOIs | |
Publication status | Published - 2007 Dec 1 |
Event | 16th Annual 2007 International Symposium on Semiconductor Manufacturing, ISSM - Santa Clara, CA, United States Duration: 2007 Oct 15 → 2007 Oct 17 |
Other
Other | 16th Annual 2007 International Symposium on Semiconductor Manufacturing, ISSM |
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Country/Territory | United States |
City | Santa Clara, CA |
Period | 07/10/15 → 07/10/17 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Industrial and Manufacturing Engineering
- Electrical and Electronic Engineering