Estimate on CO2 emissions reduction effects achieved by the adoption of a water spray humidification system to clean rooms

Uemura Satoshi; Kazuaki Iijima; Migaku Takahashi; Tadahiro Ohmi

doi:10.1109/ISSM.2007.4446794

Estimate on CO₂ emissions reduction effects achieved by the adoption of a water spray humidification system to clean rooms

Uemura Satoshi, Kazuaki Iijima, Migaku Takahashi, Tadahiro Ohmi

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We proposed water spray humidification in an indoor system for clean rooms used for the production of semiconductors and FPDs, and calculated the energy-saving effect and CO₂ emission reduction effect of this system. As a result of estimate on annual energy consumption by air conditioning at model semiconductor factory, this system can be reduced heating load of 76% and CO₂ emission of 0.23 ton-CO₂/Year per volume of outside air of 1 m³/min.

Original language	English
Title of host publication	2007 International Symposium on Semiconductor Manufacturing, ISSM - Conference Proceedings
Pages	164-167
Number of pages	4
DOIs	https://doi.org/10.1109/ISSM.2007.4446794
Publication status	Published - 2007 Dec 1
Event	16th Annual 2007 International Symposium on Semiconductor Manufacturing, ISSM - Santa Clara, CA, United States Duration: 2007 Oct 15 → 2007 Oct 17

Other

Other	16th Annual 2007 International Symposium on Semiconductor Manufacturing, ISSM
Country/Territory	United States
City	Santa Clara, CA
Period	07/10/15 → 07/10/17

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Industrial and Manufacturing Engineering
Electrical and Electronic Engineering

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Access to Document

10.1109/ISSM.2007.4446794

Cite this

Estimate on CO₂ emissions reduction effects achieved by the adoption of a water spray humidification system to clean rooms. / Satoshi, Uemura; Iijima, Kazuaki; Takahashi, Migaku et al.

2007 International Symposium on Semiconductor Manufacturing, ISSM - Conference Proceedings. 2007. p. 164-167 4446794.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Satoshi, U, Iijima, K, Takahashi, M & Ohmi, T 2007, Estimate on CO₂ emissions reduction effects achieved by the adoption of a water spray humidification system to clean rooms. in 2007 International Symposium on Semiconductor Manufacturing, ISSM - Conference Proceedings., 4446794, pp. 164-167, 16th Annual 2007 International Symposium on Semiconductor Manufacturing, ISSM, Santa Clara, CA, United States, 07/10/15. https://doi.org/10.1109/ISSM.2007.4446794

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