Erratum: Synthesis of pseudobrookite titanium oxynitride Ti3-δO4N films by laser chemical vapor deposition (Vacuum (2015) 116 (121-123))

Akihiko Ito; Hye Sook Joo; Taek Soo Kim; Takashi Goto

doi:10.1016/j.vacuum.2015.09.012

Erratum: Synthesis of pseudobrookite titanium oxynitride Ti_3-δO₄N films by laser chemical vapor deposition (Vacuum (2015) 116 (121-123))

Akihiko Ito, Hye Sook Joo, Taek Soo Kim, Takashi Goto

Materials Processing and Characterization Division

Research output: Contribution to journal › Comment/debate › peer-review

1 Citation (Scopus)

Original language	English
Pages (from-to)	108
Number of pages	1
Journal	Vacuum
Volume	124
DOIs	https://doi.org/10.1016/j.vacuum.2015.09.012
Publication status	Published - 2016 Feb 1

ASJC Scopus subject areas

Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films

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10.1016/j.vacuum.2015.09.012

Cite this

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title = "Erratum: Synthesis of pseudobrookite titanium oxynitride Ti3-δO4N films by laser chemical vapor deposition (Vacuum (2015) 116 (121-123))",

author = "Akihiko Ito and Joo, {Hye Sook} and Kim, {Taek Soo} and Takashi Goto",

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T2 - Synthesis of pseudobrookite titanium oxynitride Ti3-δO4N films by laser chemical vapor deposition (Vacuum (2015) 116 (121-123))

AU - Ito, Akihiko

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AU - Kim, Taek Soo

AU - Goto, Takashi

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DO - 10.1016/j.vacuum.2015.09.012

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JO - Vacuum

JF - Vacuum

SN - 0042-207X

ER -

Erratum: Synthesis of pseudobrookite titanium oxynitride Ti3-δO4N films by laser chemical vapor deposition (Vacuum (2015) 116 (121-123))

ASJC Scopus subject areas

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Erratum: Synthesis of pseudobrookite titanium oxynitride Ti_3-δO₄N films by laser chemical vapor deposition (Vacuum (2015) 116 (121-123))