Erratum: Study of demolding characteristics in step and repeat ultra violet nanoimprinting (Japanese Journal of Applied Physics (2013) 52 (06GJ04))

Shuso Iyoshi, Makoto Okada, Tetsuya Katase, Katsuhiko Tone, Kei Kobayashi, Shu Kaneko, Yuichi Haruyama, Masaru Nakagawa, Hiroshi Hiroshima, Shinji Matsui

Research output: Contribution to journalComment/debate

Original languageEnglish
Article number089201
JournalJapanese journal of applied physics
Volume52
Issue number8
DOIs
Publication statusPublished - 2013 Aug

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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