Erratum: Study of demolding characteristics in step and repeat ultra violet nanoimprinting (Japanese Journal of Applied Physics (2013) 52 (06GJ04))

Shuso Iyoshi; Makoto Okada; Tetsuya Katase; Katsuhiko Tone; Kei Kobayashi; Shu Kaneko; Yuichi Haruyama; Masaru Nakagawa; Hiroshi Hiroshima; Shinji Matsui

doi:10.7567/JJAP.52.089201

Erratum: Study of demolding characteristics in step and repeat ultra violet nanoimprinting (Japanese Journal of Applied Physics (2013) 52 (06GJ04))

Shuso Iyoshi, Makoto Okada, Tetsuya Katase, Katsuhiko Tone, Kei Kobayashi, Shu Kaneko, Yuichi Haruyama, Masaru Nakagawa, Hiroshi Hiroshima, Shinji Matsui

Polymer Hybrid Materials Research Center

Research output: Contribution to journal › Comment/debate › peer-review

Original language	English
Article number	089201
Journal	Japanese journal of applied physics
Volume	52
Issue number	8
DOIs	https://doi.org/10.7567/JJAP.52.089201
Publication status	Published - 2013 Aug

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

Access to Document

10.7567/JJAP.52.089201

Cite this

Iyoshi, S., Okada, M., Katase, T., Tone, K., Kobayashi, K., Kaneko, S., Haruyama, Y., Nakagawa, M., Hiroshima, H., & Matsui, S. (2013). Erratum: Study of demolding characteristics in step and repeat ultra violet nanoimprinting (Japanese Journal of Applied Physics (2013) 52 (06GJ04)). Japanese journal of applied physics, 52(8), [089201]. https://doi.org/10.7567/JJAP.52.089201

Erratum : Study of demolding characteristics in step and repeat ultra violet nanoimprinting (Japanese Journal of Applied Physics (2013) 52 (06GJ04)). / Iyoshi, Shuso; Okada, Makoto; Katase, Tetsuya; Tone, Katsuhiko; Kobayashi, Kei; Kaneko, Shu; Haruyama, Yuichi; Nakagawa, Masaru; Hiroshima, Hiroshi; Matsui, Shinji.

In: Japanese journal of applied physics, Vol. 52, No. 8, 089201, 08.2013.

Research output: Contribution to journal › Comment/debate › peer-review

Iyoshi, S, Okada, M, Katase, T, Tone, K, Kobayashi, K, Kaneko, S, Haruyama, Y, Nakagawa, M, Hiroshima, H & Matsui, S 2013, 'Erratum: Study of demolding characteristics in step and repeat ultra violet nanoimprinting (Japanese Journal of Applied Physics (2013) 52 (06GJ04))', Japanese journal of applied physics, vol. 52, no. 8, 089201. https://doi.org/10.7567/JJAP.52.089201

Iyoshi, Shuso ; Okada, Makoto ; Katase, Tetsuya ; Tone, Katsuhiko ; Kobayashi, Kei ; Kaneko, Shu ; Haruyama, Yuichi ; Nakagawa, Masaru ; Hiroshima, Hiroshi ; Matsui, Shinji. / Erratum : Study of demolding characteristics in step and repeat ultra violet nanoimprinting (Japanese Journal of Applied Physics (2013) 52 (06GJ04)). In: Japanese journal of applied physics. 2013 ; Vol. 52, No. 8.

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