Erratum: Study of demolding characteristics in step and repeat ultra violet nanoimprinting (Japanese Journal of Applied Physics (2013) 52 (06GJ04))

Shuso Iyoshi; Makoto Okada; Tetsuya Katase; Katsuhiko Tone; Kei Kobayashi; Shu Kaneko; Yuichi Haruyama; Masaru Nakagawa; Hiroshi Hiroshima; Shinji Matsui

doi:10.7567/JJAP.52.089201

Erratum: Study of demolding characteristics in step and repeat ultra violet nanoimprinting (Japanese Journal of Applied Physics (2013) 52 (06GJ04))

Shuso Iyoshi, Makoto Okada, Tetsuya Katase, Katsuhiko Tone, Kei Kobayashi, Shu Kaneko, Yuichi Haruyama, Masaru Nakagawa, Hiroshi Hiroshima, Shinji Matsui

Research output: Contribution to journal › Comment/debate › peer-review

Original language	English
Article number	089201
Journal	Japanese journal of applied physics
Volume	52
Issue number	8
DOIs	https://doi.org/10.7567/JJAP.52.089201
Publication status	Published - 2013 Aug

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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10.7567/JJAP.52.089201

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Iyoshi, S., Okada, M., Katase, T., Tone, K., Kobayashi, K., Kaneko, S., Haruyama, Y., Nakagawa, M., Hiroshima, H., & Matsui, S. (2013). Erratum: Study of demolding characteristics in step and repeat ultra violet nanoimprinting (Japanese Journal of Applied Physics (2013) 52 (06GJ04)). Japanese journal of applied physics, 52(8), [089201]. https://doi.org/10.7567/JJAP.52.089201

Erratum : Study of demolding characteristics in step and repeat ultra violet nanoimprinting (Japanese Journal of Applied Physics (2013) 52 (06GJ04)). / Iyoshi, Shuso; Okada, Makoto; Katase, Tetsuya; Tone, Katsuhiko; Kobayashi, Kei; Kaneko, Shu; Haruyama, Yuichi; Nakagawa, Masaru; Hiroshima, Hiroshi; Matsui, Shinji.

In: Japanese journal of applied physics, Vol. 52, No. 8, 089201, 08.2013.

Research output: Contribution to journal › Comment/debate › peer-review

Iyoshi, S, Okada, M, Katase, T, Tone, K, Kobayashi, K, Kaneko, S, Haruyama, Y, Nakagawa, M, Hiroshima, H & Matsui, S 2013, 'Erratum: Study of demolding characteristics in step and repeat ultra violet nanoimprinting (Japanese Journal of Applied Physics (2013) 52 (06GJ04))', Japanese journal of applied physics, vol. 52, no. 8, 089201. https://doi.org/10.7567/JJAP.52.089201

Iyoshi, Shuso ; Okada, Makoto ; Katase, Tetsuya ; Tone, Katsuhiko ; Kobayashi, Kei ; Kaneko, Shu ; Haruyama, Yuichi ; Nakagawa, Masaru ; Hiroshima, Hiroshi ; Matsui, Shinji. / Erratum : Study of demolding characteristics in step and repeat ultra violet nanoimprinting (Japanese Journal of Applied Physics (2013) 52 (06GJ04)). In: Japanese journal of applied physics. 2013 ; Vol. 52, No. 8.

@article{ee947f4d993649729d65d8fe3fcf66a0,

title = "Erratum: Study of demolding characteristics in step and repeat ultra violet nanoimprinting (Japanese Journal of Applied Physics (2013) 52 (06GJ04))",

author = "Shuso Iyoshi and Makoto Okada and Tetsuya Katase and Katsuhiko Tone and Kei Kobayashi and Shu Kaneko and Yuichi Haruyama and Masaru Nakagawa and Hiroshi Hiroshima and Shinji Matsui",

year = "2013",

month = aug,

doi = "10.7567/JJAP.52.089201",

language = "English",

volume = "52",

journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",

issn = "0021-4922",

publisher = "Japan Society of Applied Physics",

number = "8",

}

TY - JOUR

T1 - Erratum

T2 - Study of demolding characteristics in step and repeat ultra violet nanoimprinting (Japanese Journal of Applied Physics (2013) 52 (06GJ04))

AU - Iyoshi, Shuso

AU - Okada, Makoto

AU - Katase, Tetsuya

AU - Tone, Katsuhiko

AU - Kobayashi, Kei

AU - Kaneko, Shu

AU - Haruyama, Yuichi

AU - Nakagawa, Masaru

AU - Hiroshima, Hiroshi

AU - Matsui, Shinji

PY - 2013/8

Y1 - 2013/8

UR - http://www.scopus.com/inward/record.url?scp=84882305538&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84882305538&partnerID=8YFLogxK

U2 - 10.7567/JJAP.52.089201

DO - 10.7567/JJAP.52.089201

M3 - Comment/debate

AN - SCOPUS:84882305538

VL - 52

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

SN - 0021-4922

IS - 8

M1 - 089201

ER -

Erratum: Study of demolding characteristics in step and repeat ultra violet nanoimprinting (Japanese Journal of Applied Physics (2013) 52 (06GJ04))

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