Erratum: Study of demolding characteristics in step and repeat ultra violet nanoimprinting (Japanese Journal of Applied Physics (2013) 52 (06GJ04))

Shuso Iyoshi, Makoto Okada, Tetsuya Katase, Katsuhiko Tone, Kei Kobayashi, Shu Kaneko, Yuichi Haruyama, Masaru Nakagawa, Hiroshi Hiroshima, Shinji Matsui

    Research output: Contribution to journalComment/debatepeer-review

    Original languageEnglish
    Article number089201
    JournalJapanese journal of applied physics
    Volume52
    Issue number8
    DOIs
    Publication statusPublished - 2013 Aug

    ASJC Scopus subject areas

    • Engineering(all)
    • Physics and Astronomy(all)

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