Erratum: Early nitriding stage of evaporated-Ti thin films by N-ion implantation (J. Vac. Sci. Technol. A (1997) 15(4) (1848–1852) (10.1116/1.580651))

Y. Kasukabe, S. Takeda, Y. Fujino, Y. Yamada, Shinji Nagata, M. Kishimoto, S. Yamaguchi

Research output: Contribution to journalComment/debatepeer-review

Original languageEnglish
Number of pages1
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Issue number1
Publication statusPublished - 1998 Jan

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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