Erratum: Early nitriding stage of evaporated-Ti thin films by N-ion implantation (J. Vac. Sci. Technol. A (1997) 15(4) (1848–1852) (10.1116/1.580651))

Y. Kasukabe; S. Takeda; Y. Fujino; Y. Yamada; Shinji Nagata; M. Kishimoto; S. Yamaguchi

doi:10.1116/1.580972

Erratum: Early nitriding stage of evaporated-Ti thin films by N-ion implantation (J. Vac. Sci. Technol. A (1997) 15(4) (1848–1852) (10.1116/1.580651))

Y. Kasukabe, S. Takeda, Y. Fujino, Y. Yamada, Shinji Nagata, M. Kishimoto, S. Yamaguchi

Division of Research in Higher Education

Research output: Contribution to journal › Comment/debate › peer-review

Original language	English
Number of pages	1
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	16
Issue number	1
DOIs	https://doi.org/10.1116/1.580972
Publication status	Published - 1998 Jan

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

Access to Document

10.1116/1.580972

Cite this

Erratum : Early nitriding stage of evaporated-Ti thin films by N-ion implantation (J. Vac. Sci. Technol. A (1997) 15(4) (1848–1852) (10.1116/1.580651)). / Kasukabe, Y.; Takeda, S.; Fujino, Y. et al.

In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Vol. 16, No. 1, 01.1998.

Research output: Contribution to journal › Comment/debate › peer-review

@article{3c0cc63ee807499ca732230e3a92e985,

title = "Erratum: Early nitriding stage of evaporated-Ti thin films by N-ion implantation (J. Vac. Sci. Technol. A (1997) 15(4) (1848–1852) (10.1116/1.580651))",

author = "Y. Kasukabe and S. Takeda and Y. Fujino and Y. Yamada and Shinji Nagata and M. Kishimoto and S. Yamaguchi",

year = "1998",

month = jan,

doi = "10.1116/1.580972",

language = "English",

volume = "16",

journal = "Journal of Vacuum Science and Technology A",

issn = "0734-2101",

publisher = "AVS Science and Technology Society",

number = "1",

}

TY - JOUR

T1 - Erratum

T2 - Early nitriding stage of evaporated-Ti thin films by N-ion implantation (J. Vac. Sci. Technol. A (1997) 15(4) (1848–1852) (10.1116/1.580651))

AU - Kasukabe, Y.

AU - Takeda, S.

AU - Fujino, Y.

AU - Yamada, Y.

AU - Nagata, Shinji

AU - Kishimoto, M.

AU - Yamaguchi, S.

PY - 1998/1

Y1 - 1998/1

UR - http://www.scopus.com/inward/record.url?scp=85023624359&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85023624359&partnerID=8YFLogxK

U2 - 10.1116/1.580972

DO - 10.1116/1.580972

M3 - Comment/debate

AN - SCOPUS:85023624359

SN - 0734-2101

VL - 16

JO - Journal of Vacuum Science and Technology A

JF - Journal of Vacuum Science and Technology A

IS - 1

ER -

Erratum: Early nitriding stage of evaporated-Ti thin films by N-ion implantation (J. Vac. Sci. Technol. A (1997) 15(4) (1848–1852) (10.1116/1.580651))

ASJC Scopus subject areas

Access to Document

Other files and links

Cite this