Epitaxial Growth of (Na,K)NbO3 based materials on SrTiO 3 by pulsed laser deposition

T. Hanawa, N. Kikuchi, K. Nishio, K. Tonooka, R. Wang, T. Mamiya

    Research output: Contribution to journalConference articlepeer-review

    Abstract

    Lead-free, piezoelectric (Na,K)NbO3-BaZrO3-(Bi,Li) TiO3 films were epitaxially grown onto (100) SrTiO3 substrate via pulsed laser deposition. The effects of post-annealing temperature on the crystal phases, mosaic spread, and chemical composition of the deposited (Na,K)NbO3 and (Na,K)NbO3-BaZrO3-(Bi,Li) TiO3 films were analyzed. Results indicate the epitaxial growth of (Na,K)NbO3-BaZrO3-(Bi,Li)TiO3 films deposited at an oxygen pressure (PO2) of ≥40 Pa and substrate temperature (Ts) of 800°C. The alkaline-deficiency could be suppressed in the (Na,K)NbO3-BaZrO3-(Bi,Li)TiO3 films deposited at PO2 ≥ 70 Pa. AFM profile of the (Na,K)NbO3 post-annealed at 1000°C indicates the epitaxial growth of film with atomically flat step-terrace structure, while that of the (Na,K)NbO 3-BaZrO3-(Bi,Li)TiO3 film post-annealed at 1200°C shows relatively smooth surface with step-terrace structure and several cubic crystals. It was also found that the preferential evaporation of alkaline components could be suppressed by annealing under covered substrate condition.

    Original languageEnglish
    JournalMaterials Research Society Symposium Proceedings
    Volume1633
    DOIs
    Publication statusPublished - 2014 Jan 1
    Event2013 MRS Fall Meeting - Boston, MA, United States
    Duration: 2013 Dec 12013 Dec 6

    Keywords

    • epitaxy
    • laser ablation
    • piezoelectric

    ASJC Scopus subject areas

    • Materials Science(all)
    • Condensed Matter Physics
    • Mechanics of Materials
    • Mechanical Engineering

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