Epitaxial Growth of (Na,K)NbO3 based materials on SrTiO 3 by pulsed laser deposition

T. Hanawa; N. Kikuchi; K. Nishio; K. Tonooka; R. Wang; T. Mamiya

doi:10.1557/opl.2014.84

Epitaxial Growth of (Na,K)NbO₃ based materials on SrTiO ₃ by pulsed laser deposition

T. Hanawa, N. Kikuchi, K. Nishio, K. Tonooka, R. Wang, T. Mamiya

Research output: Contribution to journal › Conference article › peer-review

Abstract

Lead-free, piezoelectric (Na,K)NbO₃-BaZrO₃-(Bi,Li) TiO₃ films were epitaxially grown onto (100) SrTiO₃ substrate via pulsed laser deposition. The effects of post-annealing temperature on the crystal phases, mosaic spread, and chemical composition of the deposited (Na,K)NbO₃ and (Na,K)NbO₃-BaZrO₃-(Bi,Li) TiO₃ films were analyzed. Results indicate the epitaxial growth of (Na,K)NbO₃-BaZrO₃-(Bi,Li)TiO₃ films deposited at an oxygen pressure (PO₂) of ≥40 Pa and substrate temperature (Ts) of 800°C. The alkaline-deficiency could be suppressed in the (Na,K)NbO₃-BaZrO₃-(Bi,Li)TiO₃ films deposited at PO₂ ≥ 70 Pa. AFM profile of the (Na,K)NbO₃ post-annealed at 1000°C indicates the epitaxial growth of film with atomically flat step-terrace structure, while that of the (Na,K)NbO ₃-BaZrO₃-(Bi,Li)TiO₃ film post-annealed at 1200°C shows relatively smooth surface with step-terrace structure and several cubic crystals. It was also found that the preferential evaporation of alkaline components could be suppressed by annealing under covered substrate condition.

Original language	English
Journal	Materials Research Society Symposium Proceedings
Volume	1633
DOIs	https://doi.org/10.1557/opl.2014.84
Publication status	Published - 2014
Event	2013 MRS Fall Meeting - Boston, MA, United States Duration: 2013 Dec 1 → 2013 Dec 6

Keywords

epitaxy
laser ablation
piezoelectric

ASJC Scopus subject areas

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

Access to Document

10.1557/opl.2014.84

Cite this

@article{ab0ba20f75b8421dbceaee6bb468e19d,

title = "Epitaxial Growth of (Na,K)NbO3 based materials on SrTiO 3 by pulsed laser deposition",

abstract = "Lead-free, piezoelectric (Na,K)NbO3-BaZrO3-(Bi,Li) TiO3 films were epitaxially grown onto (100) SrTiO3 substrate via pulsed laser deposition. The effects of post-annealing temperature on the crystal phases, mosaic spread, and chemical composition of the deposited (Na,K)NbO3 and (Na,K)NbO3-BaZrO3-(Bi,Li) TiO3 films were analyzed. Results indicate the epitaxial growth of (Na,K)NbO3-BaZrO3-(Bi,Li)TiO3 films deposited at an oxygen pressure (PO2) of ≥40 Pa and substrate temperature (Ts) of 800°C. The alkaline-deficiency could be suppressed in the (Na,K)NbO3-BaZrO3-(Bi,Li)TiO3 films deposited at PO2 ≥ 70 Pa. AFM profile of the (Na,K)NbO3 post-annealed at 1000°C indicates the epitaxial growth of film with atomically flat step-terrace structure, while that of the (Na,K)NbO 3-BaZrO3-(Bi,Li)TiO3 film post-annealed at 1200°C shows relatively smooth surface with step-terrace structure and several cubic crystals. It was also found that the preferential evaporation of alkaline components could be suppressed by annealing under covered substrate condition.",

keywords = "epitaxy, laser ablation, piezoelectric",

author = "T. Hanawa and N. Kikuchi and K. Nishio and K. Tonooka and R. Wang and T. Mamiya",

year = "2014",

doi = "10.1557/opl.2014.84",

language = "English",

volume = "1633",

journal = "Materials Research Society Symposium - Proceedings",

issn = "0272-9172",

publisher = "Materials Research Society",

note = "2013 MRS Fall Meeting ; Conference date: 01-12-2013 Through 06-12-2013",

}

TY - JOUR

T1 - Epitaxial Growth of (Na,K)NbO3 based materials on SrTiO 3 by pulsed laser deposition

AU - Hanawa, T.

AU - Kikuchi, N.

AU - Nishio, K.

AU - Tonooka, K.

AU - Wang, R.

AU - Mamiya, T.

PY - 2014

Y1 - 2014

N2 - Lead-free, piezoelectric (Na,K)NbO3-BaZrO3-(Bi,Li) TiO3 films were epitaxially grown onto (100) SrTiO3 substrate via pulsed laser deposition. The effects of post-annealing temperature on the crystal phases, mosaic spread, and chemical composition of the deposited (Na,K)NbO3 and (Na,K)NbO3-BaZrO3-(Bi,Li) TiO3 films were analyzed. Results indicate the epitaxial growth of (Na,K)NbO3-BaZrO3-(Bi,Li)TiO3 films deposited at an oxygen pressure (PO2) of ≥40 Pa and substrate temperature (Ts) of 800°C. The alkaline-deficiency could be suppressed in the (Na,K)NbO3-BaZrO3-(Bi,Li)TiO3 films deposited at PO2 ≥ 70 Pa. AFM profile of the (Na,K)NbO3 post-annealed at 1000°C indicates the epitaxial growth of film with atomically flat step-terrace structure, while that of the (Na,K)NbO 3-BaZrO3-(Bi,Li)TiO3 film post-annealed at 1200°C shows relatively smooth surface with step-terrace structure and several cubic crystals. It was also found that the preferential evaporation of alkaline components could be suppressed by annealing under covered substrate condition.

AB - Lead-free, piezoelectric (Na,K)NbO3-BaZrO3-(Bi,Li) TiO3 films were epitaxially grown onto (100) SrTiO3 substrate via pulsed laser deposition. The effects of post-annealing temperature on the crystal phases, mosaic spread, and chemical composition of the deposited (Na,K)NbO3 and (Na,K)NbO3-BaZrO3-(Bi,Li) TiO3 films were analyzed. Results indicate the epitaxial growth of (Na,K)NbO3-BaZrO3-(Bi,Li)TiO3 films deposited at an oxygen pressure (PO2) of ≥40 Pa and substrate temperature (Ts) of 800°C. The alkaline-deficiency could be suppressed in the (Na,K)NbO3-BaZrO3-(Bi,Li)TiO3 films deposited at PO2 ≥ 70 Pa. AFM profile of the (Na,K)NbO3 post-annealed at 1000°C indicates the epitaxial growth of film with atomically flat step-terrace structure, while that of the (Na,K)NbO 3-BaZrO3-(Bi,Li)TiO3 film post-annealed at 1200°C shows relatively smooth surface with step-terrace structure and several cubic crystals. It was also found that the preferential evaporation of alkaline components could be suppressed by annealing under covered substrate condition.

KW - epitaxy

KW - laser ablation

KW - piezoelectric

UR - http://www.scopus.com/inward/record.url?scp=84897970470&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84897970470&partnerID=8YFLogxK

U2 - 10.1557/opl.2014.84

DO - 10.1557/opl.2014.84

M3 - Conference article

AN - SCOPUS:84897970470

VL - 1633

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

SN - 0272-9172

T2 - 2013 MRS Fall Meeting

Y2 - 1 December 2013 through 6 December 2013

ER -