Epitaxial growth of metallic buffer layer structure and c-axis oriented Pb(Mn1/3,Nb2/3)O3-Pb(Zr,Ti)O3 thin film on Si for high performance piezoelectric micromachined ultrasonic transducer

Pham Ngoc Thao, Shinya Yoshida, Shuji Tanaka

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Engineering & Materials Science

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