TY - JOUR
T1 - Epitaxial growth of (104)- and (018)-oriented licoO2 films on MgO single crystals prepared by chemical vapor deposition
AU - Katsui, H.
AU - Goto, T.
N1 - Funding Information:
This work was supported by the MEXT (Ministry of Education, Culture, Sports, Science and Technology) , the Grant-in-Aid for Young Scientists (B) no. 24760558 , and a cooperative program of the ARCMG-IMR, Tohoku University .
PY - 2013
Y1 - 2013
N2 - The lithium cobaltate (LiCoO2) films were deposited onto single-crystal magnesium oxide (MgO) substrates by metal organic chemical vapor deposition, and the in-plane orientation relationship, morphology and deposition rates were investigated. Hetero-epitaxial LiCoO2 films oriented to (104) and (018) were obtained on (100) and (110) MgO substrates. The surface morphology of the (104) LiCoO2 film showed diagonally arrayed rectangular facets, whereas the (018) LiCoO2 film exhibited a roof-like structure extended unidirectionally to [110] MgO. Twin structures formed with in-plane relationships of [010] LiCoO2 // [010] LiCoO2 and [421] LiCoO2 // [010] LiCoO2 in the (104) LiCoO2 film and with in-plane relationships of [100] LiCoO2 // [100] LiCoO2 in the (018) LiCoO2 film. The deposition rates of the (104)- and (018)-oriented LiCoO2 films were 10.8 μm h-1 and 8.8 μm h-1, respectively, which were almost 100 times greater than those reported for LiCoO2 epitaxial films fabricated by pulsed laser deposition.
AB - The lithium cobaltate (LiCoO2) films were deposited onto single-crystal magnesium oxide (MgO) substrates by metal organic chemical vapor deposition, and the in-plane orientation relationship, morphology and deposition rates were investigated. Hetero-epitaxial LiCoO2 films oriented to (104) and (018) were obtained on (100) and (110) MgO substrates. The surface morphology of the (104) LiCoO2 film showed diagonally arrayed rectangular facets, whereas the (018) LiCoO2 film exhibited a roof-like structure extended unidirectionally to [110] MgO. Twin structures formed with in-plane relationships of [010] LiCoO2 // [010] LiCoO2 and [421] LiCoO2 // [010] LiCoO2 in the (104) LiCoO2 film and with in-plane relationships of [100] LiCoO2 // [100] LiCoO2 in the (018) LiCoO2 film. The deposition rates of the (104)- and (018)-oriented LiCoO2 films were 10.8 μm h-1 and 8.8 μm h-1, respectively, which were almost 100 times greater than those reported for LiCoO2 epitaxial films fabricated by pulsed laser deposition.
KW - Epitaxial growth
KW - High deposition rate
KW - Lithium cobaltate
KW - Lithium ion batteries
KW - MOCVD
KW - Twin structure
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U2 - 10.1016/j.surfcoat.2012.12.027
DO - 10.1016/j.surfcoat.2012.12.027
M3 - Article
AN - SCOPUS:84878842201
VL - 218
SP - 57
EP - 61
JO - Surface and Coatings Technology
JF - Surface and Coatings Technology
SN - 0257-8972
IS - 1
ER -
