To monitor the concentrations of environmental pollutants and atmospheric components, a sensitive and selective system is needed. For such a system, we propose using plasma-synthesized fluoropolymer films as sensors and introduce several algorithms for gas recognition. Plasma-polymer films have unsaturated bonds and radical sites resulting in several unique characteristics. These films are deposited on both sides of an AT-cut quartz crystal microbalance (QCM) by radio-frequency (rf) sputtering. The QCM's response consists of a resonant frequency shift proportional to the mass of the absorbed molecules.
|Number of pages||8|
|Journal||NTT R and D|
|Publication status||Published - 1993 Dec 1|
ASJC Scopus subject areas
- Electrical and Electronic Engineering