Abstract
To monitor the concentrations of environmental pollutants and atmospheric components, a sensitive and selective system is needed. For such a system, we propose using plasma-synthesized fluoropolymer films as sensors and introduce several algorithms for gas recognition. Plasma-polymer films have unsaturated bonds and radical sites resulting in several unique characteristics. These films are deposited on both sides of an AT-cut quartz crystal microbalance (QCM) by radio-frequency (rf) sputtering. The QCM's response consists of a resonant frequency shift proportional to the mass of the absorbed molecules.
| Original language | English |
|---|---|
| Pages (from-to) | 933-940 |
| Number of pages | 8 |
| Journal | NTT R and D |
| Volume | 42 |
| Issue number | 7 |
| Publication status | Published - 1993 Dec 1 |
| Externally published | Yes |
ASJC Scopus subject areas
- Electrical and Electronic Engineering