Environmental sensing (1) chemical sensing system using plasma-synthesized fluoropolymer films

Masayuki Nakamura, Iwao Sugimoto, Hiroki Kuwano

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)


To monitor the concentrations of environmental pollutants and atmospheric components, a sensitive and selective system is needed. For such a system, we propose using plasma-synthesized fluoropolymer films as sensors and introduce several algorithms for gas recognition. Plasma-polymer films have unsaturated bonds and radical sites resulting in several unique characteristics. These films are deposited on both sides of an AT-cut quartz crystal microbalance (QCM) by radio-frequency (rf) sputtering. The QCM's response consists of a resonant frequency shift proportional to the mass of the absorbed molecules.

Original languageEnglish
Pages (from-to)933-940
Number of pages8
JournalNTT R and D
Issue number7
Publication statusPublished - 1993 Dec 1
Externally publishedYes

ASJC Scopus subject areas

  • Electrical and Electronic Engineering


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