Environmental Gas-Sensing using Plasma-Deposited Organic Films

Iwao Sugimoto, Masayuki Nakamura, Hiroki Kuwano, Reiko Shimada

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)


This paper represents the gas-sensing capabilities of quartz crystal microbalance (QCM) devices coated with plasma-deposited organic films for detection of environmentally problematic compounds of chlorocarbons: chloromethanes and chloroethylenes. Plasma-deposited organic films are prepared by sputtering of amino-acids and fluoropolymers. Both types of the films shows the opposite gas-sorption characteristics; the amino-acid films have high affinities for lowly chlorinated carbons, and the fluoropolymer films show large sorption capacities for highly chlorinated carbons. These tendencies can be physicochemically interpreted by Linear Solvation Energy Relationships. The 0.5-ppm tetrachloroethylene and trichloroethylene vapors can be detected by the amino-acid-film-coated QCMs, even though they have low cross sections for highly chlorinated carbons.

Original languageEnglish
Pages (from-to)86-91
Number of pages6
JournalIEEJ Transactions on Sensors and Micromachines
Issue number2
Publication statusPublished - 1998
Externally publishedYes

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering


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