Enhancement of current drivability of nanograting polycrystalline silicon thin-film transistors

Shin Ichiro Kuroki, Xiaoli Zhu, Koji Kotani, Takashi Ito

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

The nanograting channel structure was introduced to a polycrystalline silicon thin-film transistor (poly-Si TFT) to enhance the current drivability. With the formation of the nanograting in the channel region, the effective width was enhanced without the increase in the planar area. At the same overdrive voltage, the drain current of the nanograting TFTs was larger than that of the conventional planar ones at the same planar dimension. In addition to the increase in the effective channel width, the drivability enhancement was further caused by the increase in electron mobility. The increase in the electron field-effect mobility by the nanograting structure was 42% at the maximum.

Original languageEnglish
Article number04DJ11
JournalJapanese journal of applied physics
Volume49
Issue number4 PART 2
DOIs
Publication statusPublished - 2010 Apr 1

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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