Enhanced methyl-radical production in an Ar-CH4 pin-hollow cathode discharge

S. Iizuka, T. Takada, N. Sato

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

A methyl-radical formation is observed to be enhanced in an Ar-CH 4 discharge plasma using a hollow cathode with movable pins inside. In the discharge with pins, high energy electrons in the radial edge region of the plasma column produce methyl radicals. They diffuse toward the central region of the plasma column, increasing their density, where the electron temperature is so low (≅0.4 eV) that there occurs no reaction to decrease the methyl-radical density.

Original languageEnglish
Pages (from-to)1786-1788
Number of pages3
JournalApplied Physics Letters
Volume64
Issue number14
DOIs
Publication statusPublished - 1994 Dec 1

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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