Enhanced chromatographic performance of silicon-micromachined capillary column with clean structure and interactive plasma organic films

Shinsuke Hannoe; Iwao Sugimoto; Keiichi Yanagisawa; Hiroki Kuwano

Enhanced chromatographic performance of silicon-micromachined capillary column with clean structure and interactive plasma organic films

Shinsuke Hannoe, Iwao Sugimoto, Keiichi Yanagisawa, Hiroki Kuwano

Research output: Contribution to conference › Paper › peer-review

Abstract

A clean and small dead-space-micro-column was fabricated by silicon isotropic wet etching and ultrasonic machining. The micro-column which was formed on silicon substrate was 100 μm in width, 10 μm in depth, and 2.0 m in length. It has a very smooth surface which was formed by isotropic wet etching using a mixture of hydrofluoric, nitric, and acetic acid. To achieve connection to the detector and injection system, a new ultrasonic machining technique was used. Stationary phase of this micro-column was made from a sputtered fluoropolymer film for enhancing separation. This micro-column demonstrates enhanced chromatographic performance for methane gas analysis.

Original language	English
Pages	515-518
Number of pages	4
Publication status	Published - 1997 Jan 1
Externally published	Yes
Event	Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2) - Chicago, IL, USA Duration: 1997 Jun 16 → 1997 Jun 19

Other

Other	Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2)
City	Chicago, IL, USA
Period	97/6/16 → 97/6/19

ASJC Scopus subject areas

Engineering(all)

Cite this

Enhanced chromatographic performance of silicon-micromachined capillary column with clean structure and interactive plasma organic films. / Hannoe, Shinsuke; Sugimoto, Iwao; Yanagisawa, Keiichi; Kuwano, Hiroki.

1997. 515-518 Paper presented at Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2), Chicago, IL, USA, .

Research output: Contribution to conference › Paper › peer-review

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abstract = "A clean and small dead-space-micro-column was fabricated by silicon isotropic wet etching and ultrasonic machining. The micro-column which was formed on silicon substrate was 100 μm in width, 10 μm in depth, and 2.0 m in length. It has a very smooth surface which was formed by isotropic wet etching using a mixture of hydrofluoric, nitric, and acetic acid. To achieve connection to the detector and injection system, a new ultrasonic machining technique was used. Stationary phase of this micro-column was made from a sputtered fluoropolymer film for enhancing separation. This micro-column demonstrates enhanced chromatographic performance for methane gas analysis.",

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year = "1997",

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T1 - Enhanced chromatographic performance of silicon-micromachined capillary column with clean structure and interactive plasma organic films

AU - Hannoe, Shinsuke

AU - Sugimoto, Iwao

AU - Yanagisawa, Keiichi

AU - Kuwano, Hiroki

PY - 1997/1/1

Y1 - 1997/1/1

N2 - A clean and small dead-space-micro-column was fabricated by silicon isotropic wet etching and ultrasonic machining. The micro-column which was formed on silicon substrate was 100 μm in width, 10 μm in depth, and 2.0 m in length. It has a very smooth surface which was formed by isotropic wet etching using a mixture of hydrofluoric, nitric, and acetic acid. To achieve connection to the detector and injection system, a new ultrasonic machining technique was used. Stationary phase of this micro-column was made from a sputtered fluoropolymer film for enhancing separation. This micro-column demonstrates enhanced chromatographic performance for methane gas analysis.

AB - A clean and small dead-space-micro-column was fabricated by silicon isotropic wet etching and ultrasonic machining. The micro-column which was formed on silicon substrate was 100 μm in width, 10 μm in depth, and 2.0 m in length. It has a very smooth surface which was formed by isotropic wet etching using a mixture of hydrofluoric, nitric, and acetic acid. To achieve connection to the detector and injection system, a new ultrasonic machining technique was used. Stationary phase of this micro-column was made from a sputtered fluoropolymer film for enhancing separation. This micro-column demonstrates enhanced chromatographic performance for methane gas analysis.

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M3 - Paper

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T2 - Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2)

Y2 - 16 June 1997 through 19 June 1997

ER -

Enhanced chromatographic performance of silicon-micromachined capillary column with clean structure and interactive plasma organic films

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ASJC Scopus subject areas

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