Abstract
A clean and small dead-space-micro-column was fabricated by silicon isotropic wet etching and ultrasonic machining. The micro-column which was formed on silicon substrate was 100 μm in width, 10 μm in depth, and 2.0 m in length. It has a very smooth surface which was formed by isotropic wet etching using a mixture of hydrofluoric, nitric, and acetic acid. To achieve connection to the detector and injection system, a new ultrasonic machining technique was used. Stationary phase of this micro-column was made from a sputtered fluoropolymer film for enhancing separation. This micro-column demonstrates enhanced chromatographic performance for methane gas analysis.
| Original language | English |
|---|---|
| Pages | 515-518 |
| Number of pages | 4 |
| Publication status | Published - 1997 Jan 1 |
| Externally published | Yes |
| Event | Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2) - Chicago, IL, USA Duration: 1997 Jun 16 → 1997 Jun 19 |
Other
| Other | Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2) |
|---|---|
| City | Chicago, IL, USA |
| Period | 97/6/16 → 97/6/19 |
ASJC Scopus subject areas
- Engineering(all)
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Hannoe, S., Sugimoto, I., Yanagisawa, K., & Kuwano, H. (1997). Enhanced chromatographic performance of silicon-micromachined capillary column with clean structure and interactive plasma organic films. 515-518. Paper presented at Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2), Chicago, IL, USA, .