Enhanced chromatographic performance of silicon-micromachined capillary column with clean structure and interactive plasma organic films

Shinsuke Hannoe, Iwao Sugimoto, Keiichi Yanagisawa, Hiroki Kuwano

Research output: Contribution to conferencePaper

12 Citations (Scopus)

Abstract

A clean and small dead-space-micro-column was fabricated by silicon isotropic wet etching and ultrasonic machining. The micro-column which was formed on silicon substrate was 100 μm in width, 10 μm in depth, and 2.0 m in length. It has a very smooth surface which was formed by isotropic wet etching using a mixture of hydrofluoric, nitric, and acetic acid. To achieve connection to the detector and injection system, a new ultrasonic machining technique was used. Stationary phase of this micro-column was made from a sputtered fluoropolymer film for enhancing separation. This micro-column demonstrates enhanced chromatographic performance for methane gas analysis.

Original languageEnglish
Pages515-518
Number of pages4
Publication statusPublished - 1997 Jan 1
Externally publishedYes
EventProceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2) - Chicago, IL, USA
Duration: 1997 Jun 161997 Jun 19

Other

OtherProceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2)
CityChicago, IL, USA
Period97/6/1697/6/19

ASJC Scopus subject areas

  • Engineering(all)

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    Hannoe, S., Sugimoto, I., Yanagisawa, K., & Kuwano, H. (1997). Enhanced chromatographic performance of silicon-micromachined capillary column with clean structure and interactive plasma organic films. 515-518. Paper presented at Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2), Chicago, IL, USA, .