Enhanced carrier transport in uniaxially (001)-oriented anatase Ti 0.94Nb0.06O2 films grown on nanosheet seed layers

Naoomi Yamada; Tatsuo Shibata; Kenji Taira; Yasushi Hirose; Shoichiro Nakao; Ngoc Lam Huong Hoang; Taro Hitosugi; Toshihiro Shimada; Takayoshi Sasaki; Tetsuya Hasegawa

doi:10.1143/APEX.4.045801

Enhanced carrier transport in uniaxially (001)-oriented anatase Ti _0.94Nb_0.06O₂ films grown on nanosheet seed layers

Naoomi Yamada, Tatsuo Shibata, Kenji Taira, Yasushi Hirose, Shoichiro Nakao, Ngoc Lam Huong Hoang, Taro Hitosugi, Toshihiro Shimada, Takayoshi Sasaki, Tetsuya Hasegawa

Research output: Contribution to journal › Article

19 Citations (Scopus)

Abstract

Uniaxially (001)-oriented anatase Ti_0.94Nb_0.06O ₂ films were sputtered on a seed layer of glass covered with Ca ₂Nb₃O₁₀ nanosheets (CNO-NS). The films had an effective electron mass of 0.7m₀ (m₀ denotes the free electron mass), which was smaller than that of randomly oriented films, i.e., 0.9m₀. The as-grown films exhibited a low resistivity of 7.6 × 10^-4 Ω cm. Postdeposition annealing under H₂ atmosphere further reduced the resistivity to 4.0 × 10^-4 Ωcm. This value is comparable with that of conventional transparent conducting oxides. Results indicate that sputtering using CNO-NS is promising for the fabrication of highly conductive Ti_1-xNb_xO ₂ electrodes on glass.

Original language	English
Article number	045801
Journal	Applied Physics Express
Volume	4
Issue number	4
DOIs	https://doi.org/10.1143/APEX.4.045801
Publication status	Published - 2011 Apr 1

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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Yamada, N., Shibata, T., Taira, K., Hirose, Y., Nakao, S., Hoang, N. L. H., Hitosugi, T., Shimada, T., Sasaki, T., & Hasegawa, T. (2011). Enhanced carrier transport in uniaxially (001)-oriented anatase Ti _0.94Nb_0.06O₂ films grown on nanosheet seed layers. Applied Physics Express, 4(4), [045801]. https://doi.org/10.1143/APEX.4.045801

Enhanced carrier transport in uniaxially (001)-oriented anatase Ti _0.94Nb_0.06O₂ films grown on nanosheet seed layers. / Yamada, Naoomi; Shibata, Tatsuo; Taira, Kenji; Hirose, Yasushi; Nakao, Shoichiro; Hoang, Ngoc Lam Huong; Hitosugi, Taro; Shimada, Toshihiro; Sasaki, Takayoshi; Hasegawa, Tetsuya.

In: Applied Physics Express, Vol. 4, No. 4, 045801, 01.04.2011.

Research output: Contribution to journal › Article

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abstract = "Uniaxially (001)-oriented anatase Ti0.94Nb0.06O 2 films were sputtered on a seed layer of glass covered with Ca 2Nb3O10 nanosheets (CNO-NS). The films had an effective electron mass of 0.7m0 (m0 denotes the free electron mass), which was smaller than that of randomly oriented films, i.e., 0.9m0. The as-grown films exhibited a low resistivity of 7.6 × 10-4 Ω cm. Postdeposition annealing under H2 atmosphere further reduced the resistivity to 4.0 × 10-4 Ωcm. This value is comparable with that of conventional transparent conducting oxides. Results indicate that sputtering using CNO-NS is promising for the fabrication of highly conductive Ti1-xNbxO 2 electrodes on glass.",

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