Enhanced carrier transport in uniaxially (001)-oriented anatase Ti 0.94Nb0.06O2 films grown on nanosheet seed layers

Naoomi Yamada; Tatsuo Shibata; Kenji Taira; Yasushi Hirose; Shoichiro Nakao; Ngoc Lam Huong Hoang; Taro Hitosugi; Toshihiro Shimada; Takayoshi Sasaki; Tetsuya Hasegawa

doi:10.1143/APEX.4.045801

Enhanced carrier transport in uniaxially (001)-oriented anatase Ti _0.94Nb_0.06O₂ films grown on nanosheet seed layers

Naoomi Yamada, Tatsuo Shibata, Kenji Taira, Yasushi Hirose, Shoichiro Nakao, Ngoc Lam Huong Hoang, Taro Hitosugi, Toshihiro Shimada, Takayoshi Sasaki, Tetsuya Hasegawa

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20 Citations (Scopus)

Abstract

Uniaxially (001)-oriented anatase Ti_0.94Nb_0.06O ₂ films were sputtered on a seed layer of glass covered with Ca ₂Nb₃O₁₀ nanosheets (CNO-NS). The films had an effective electron mass of 0.7m₀ (m₀ denotes the free electron mass), which was smaller than that of randomly oriented films, i.e., 0.9m₀. The as-grown films exhibited a low resistivity of 7.6 × 10^-4 Ω cm. Postdeposition annealing under H₂ atmosphere further reduced the resistivity to 4.0 × 10^-4 Ωcm. This value is comparable with that of conventional transparent conducting oxides. Results indicate that sputtering using CNO-NS is promising for the fabrication of highly conductive Ti_1-xNb_xO ₂ electrodes on glass.

Original language	English
Article number	045801
Journal	Applied Physics Express
Volume	4
Issue number	4
DOIs	https://doi.org/10.1143/APEX.4.045801
Publication status	Published - 2011 Apr

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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title = "Enhanced carrier transport in uniaxially (001)-oriented anatase Ti 0.94Nb0.06O2 films grown on nanosheet seed layers",

abstract = "Uniaxially (001)-oriented anatase Ti0.94Nb0.06O 2 films were sputtered on a seed layer of glass covered with Ca 2Nb3O10 nanosheets (CNO-NS). The films had an effective electron mass of 0.7m0 (m0 denotes the free electron mass), which was smaller than that of randomly oriented films, i.e., 0.9m0. The as-grown films exhibited a low resistivity of 7.6 × 10-4 Ω cm. Postdeposition annealing under H2 atmosphere further reduced the resistivity to 4.0 × 10-4 Ωcm. This value is comparable with that of conventional transparent conducting oxides. Results indicate that sputtering using CNO-NS is promising for the fabrication of highly conductive Ti1-xNbxO 2 electrodes on glass.",

author = "Naoomi Yamada and Tatsuo Shibata and Kenji Taira and Yasushi Hirose and Shoichiro Nakao and Hoang, {Ngoc Lam Huong} and Taro Hitosugi and Toshihiro Shimada and Takayoshi Sasaki and Tetsuya Hasegawa",

year = "2011",

month = apr,

doi = "10.1143/APEX.4.045801",

language = "English",

volume = "4",

journal = "Applied Physics Express",

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publisher = "Japan Society of Applied Physics",

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T1 - Enhanced carrier transport in uniaxially (001)-oriented anatase Ti 0.94Nb0.06O2 films grown on nanosheet seed layers

AU - Yamada, Naoomi

AU - Shibata, Tatsuo

AU - Taira, Kenji

AU - Hirose, Yasushi

AU - Nakao, Shoichiro

AU - Hoang, Ngoc Lam Huong

AU - Hitosugi, Taro

AU - Shimada, Toshihiro

AU - Sasaki, Takayoshi

AU - Hasegawa, Tetsuya

PY - 2011/4

Y1 - 2011/4

N2 - Uniaxially (001)-oriented anatase Ti0.94Nb0.06O 2 films were sputtered on a seed layer of glass covered with Ca 2Nb3O10 nanosheets (CNO-NS). The films had an effective electron mass of 0.7m0 (m0 denotes the free electron mass), which was smaller than that of randomly oriented films, i.e., 0.9m0. The as-grown films exhibited a low resistivity of 7.6 × 10-4 Ω cm. Postdeposition annealing under H2 atmosphere further reduced the resistivity to 4.0 × 10-4 Ωcm. This value is comparable with that of conventional transparent conducting oxides. Results indicate that sputtering using CNO-NS is promising for the fabrication of highly conductive Ti1-xNbxO 2 electrodes on glass.

AB - Uniaxially (001)-oriented anatase Ti0.94Nb0.06O 2 films were sputtered on a seed layer of glass covered with Ca 2Nb3O10 nanosheets (CNO-NS). The films had an effective electron mass of 0.7m0 (m0 denotes the free electron mass), which was smaller than that of randomly oriented films, i.e., 0.9m0. The as-grown films exhibited a low resistivity of 7.6 × 10-4 Ω cm. Postdeposition annealing under H2 atmosphere further reduced the resistivity to 4.0 × 10-4 Ωcm. This value is comparable with that of conventional transparent conducting oxides. Results indicate that sputtering using CNO-NS is promising for the fabrication of highly conductive Ti1-xNbxO 2 electrodes on glass.

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Enhanced carrier transport in uniaxially (001)-oriented anatase Ti _0.94Nb_0.06O₂ films grown on nanosheet seed layers

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