TY - JOUR
T1 - Enhanced carrier transport in uniaxially (001)-oriented anatase Ti 0.94Nb0.06O2 films grown on nanosheet seed layers
AU - Yamada, Naoomi
AU - Shibata, Tatsuo
AU - Taira, Kenji
AU - Hirose, Yasushi
AU - Nakao, Shoichiro
AU - Hoang, Ngoc Lam Huong
AU - Hitosugi, Taro
AU - Shimada, Toshihiro
AU - Sasaki, Takayoshi
AU - Hasegawa, Tetsuya
N1 - Copyright:
Copyright 2011 Elsevier B.V., All rights reserved.
PY - 2011/4
Y1 - 2011/4
N2 - Uniaxially (001)-oriented anatase Ti0.94Nb0.06O 2 films were sputtered on a seed layer of glass covered with Ca 2Nb3O10 nanosheets (CNO-NS). The films had an effective electron mass of 0.7m0 (m0 denotes the free electron mass), which was smaller than that of randomly oriented films, i.e., 0.9m0. The as-grown films exhibited a low resistivity of 7.6 × 10-4 Ω cm. Postdeposition annealing under H2 atmosphere further reduced the resistivity to 4.0 × 10-4 Ωcm. This value is comparable with that of conventional transparent conducting oxides. Results indicate that sputtering using CNO-NS is promising for the fabrication of highly conductive Ti1-xNbxO 2 electrodes on glass.
AB - Uniaxially (001)-oriented anatase Ti0.94Nb0.06O 2 films were sputtered on a seed layer of glass covered with Ca 2Nb3O10 nanosheets (CNO-NS). The films had an effective electron mass of 0.7m0 (m0 denotes the free electron mass), which was smaller than that of randomly oriented films, i.e., 0.9m0. The as-grown films exhibited a low resistivity of 7.6 × 10-4 Ω cm. Postdeposition annealing under H2 atmosphere further reduced the resistivity to 4.0 × 10-4 Ωcm. This value is comparable with that of conventional transparent conducting oxides. Results indicate that sputtering using CNO-NS is promising for the fabrication of highly conductive Ti1-xNbxO 2 electrodes on glass.
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U2 - 10.1143/APEX.4.045801
DO - 10.1143/APEX.4.045801
M3 - Article
AN - SCOPUS:79954444812
VL - 4
JO - Applied Physics Express
JF - Applied Physics Express
SN - 1882-0778
IS - 4
M1 - 045801
ER -