Uniaxially (001)-oriented anatase Ti0.94Nb0.06O 2 films were sputtered on a seed layer of glass covered with Ca 2Nb3O10 nanosheets (CNO-NS). The films had an effective electron mass of 0.7m0 (m0 denotes the free electron mass), which was smaller than that of randomly oriented films, i.e., 0.9m0. The as-grown films exhibited a low resistivity of 7.6 × 10-4 Ω cm. Postdeposition annealing under H2 atmosphere further reduced the resistivity to 4.0 × 10-4 Ωcm. This value is comparable with that of conventional transparent conducting oxides. Results indicate that sputtering using CNO-NS is promising for the fabrication of highly conductive Ti1-xNbxO 2 electrodes on glass.
ASJC Scopus subject areas
- Physics and Astronomy(all)