Enhanced carrier transport in uniaxially (001)-oriented anatase Ti 0.94Nb0.06O2 films grown on nanosheet seed layers

Naoomi Yamada, Tatsuo Shibata, Kenji Taira, Yasushi Hirose, Shoichiro Nakao, Ngoc Lam Huong Hoang, Taro Hitosugi, Toshihiro Shimada, Takayoshi Sasaki, Tetsuya Hasegawa

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    19 Citations (Scopus)

    Abstract

    Uniaxially (001)-oriented anatase Ti0.94Nb0.06O 2 films were sputtered on a seed layer of glass covered with Ca 2Nb3O10 nanosheets (CNO-NS). The films had an effective electron mass of 0.7m0 (m0 denotes the free electron mass), which was smaller than that of randomly oriented films, i.e., 0.9m0. The as-grown films exhibited a low resistivity of 7.6 × 10-4 Ω cm. Postdeposition annealing under H2 atmosphere further reduced the resistivity to 4.0 × 10-4 Ωcm. This value is comparable with that of conventional transparent conducting oxides. Results indicate that sputtering using CNO-NS is promising for the fabrication of highly conductive Ti1-xNbxO 2 electrodes on glass.

    Original languageEnglish
    Article number045801
    JournalApplied Physics Express
    Volume4
    Issue number4
    DOIs
    Publication statusPublished - 2011 Apr 1

    ASJC Scopus subject areas

    • Engineering(all)
    • Physics and Astronomy(all)

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    Yamada, N., Shibata, T., Taira, K., Hirose, Y., Nakao, S., Hoang, N. L. H., Hitosugi, T., Shimada, T., Sasaki, T., & Hasegawa, T. (2011). Enhanced carrier transport in uniaxially (001)-oriented anatase Ti 0.94Nb0.06O2 films grown on nanosheet seed layers. Applied Physics Express, 4(4), [045801]. https://doi.org/10.1143/APEX.4.045801