Enhanced capacitance of composite anodic ZrO2 films comprising high permittivity oxide nanocrystals and highly resistive amorphous oxide matrix

Hiroki Habazaki; Shun Koyama; Yoshitaka Aoki; Norihito Sakaguchi; Shinji Nagata

doi:10.1021/am200460c

Enhanced capacitance of composite anodic ZrO₂ films comprising high permittivity oxide nanocrystals and highly resistive amorphous oxide matrix

Hiroki Habazaki, Shun Koyama, Yoshitaka Aoki, Norihito Sakaguchi, Shinji Nagata

Materials Design Division

Research output: Contribution to journal › Article › peer-review

9 Citations (Scopus)

Abstract

Anodic oxide films with nanocrystalline tetragonal ZrO₂ precipitated in an amorphous oxide matrix were formed on Zr-Si and Zr-Al alloys and had significantly enhanced capacitance in comparison with those formed on zirconium metal. The capacitance enhancement was associated with the formation of a high-temperature stable tetragonal ZrO₂ phase with high relative permittivity as well as increased ionic resistivity, which reduces the thickness of anodic oxide films at a certain formation voltage. However, there is a general empirical trend that single-phase materials with higher permittivity have lower ionic resistivity. This study presents a novel material design based on a nanocrystalline-amorphous composite anodic oxide film for capacitor applications.

Original language	English
Pages (from-to)	2665-2670
Number of pages	6
Journal	ACS Applied Materials and Interfaces
Volume	3
Issue number	7
DOIs	https://doi.org/10.1021/am200460c
Publication status	Published - 2011 Jul 27

Keywords

ZrO
anodic oxide
capacitor
dielectric film
nanocomposite oxide

ASJC Scopus subject areas

Materials Science(all)

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10.1021/am200460c

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Enhanced capacitance of composite anodic ZrO₂ films comprising high permittivity oxide nanocrystals and highly resistive amorphous oxide matrix. / Habazaki, Hiroki; Koyama, Shun; Aoki, Yoshitaka; Sakaguchi, Norihito; Nagata, Shinji.

In: ACS Applied Materials and Interfaces, Vol. 3, No. 7, 27.07.2011, p. 2665-2670.

Research output: Contribution to journal › Article › peer-review

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AU - Nagata, Shinji

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