Enhanced capacitance of composite anodic ZrO2 films comprising high permittivity oxide nanocrystals and highly resistive amorphous oxide matrix

Hiroki Habazaki, Shun Koyama, Yoshitaka Aoki, Norihito Sakaguchi, Shinji Nagata

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)

Abstract

Anodic oxide films with nanocrystalline tetragonal ZrO2 precipitated in an amorphous oxide matrix were formed on Zr-Si and Zr-Al alloys and had significantly enhanced capacitance in comparison with those formed on zirconium metal. The capacitance enhancement was associated with the formation of a high-temperature stable tetragonal ZrO2 phase with high relative permittivity as well as increased ionic resistivity, which reduces the thickness of anodic oxide films at a certain formation voltage. However, there is a general empirical trend that single-phase materials with higher permittivity have lower ionic resistivity. This study presents a novel material design based on a nanocrystalline-amorphous composite anodic oxide film for capacitor applications.

Original languageEnglish
Pages (from-to)2665-2670
Number of pages6
JournalACS Applied Materials and Interfaces
Volume3
Issue number7
DOIs
Publication statusPublished - 2011 Jul 27

Keywords

  • ZrO
  • anodic oxide
  • capacitor
  • dielectric film
  • nanocomposite oxide

ASJC Scopus subject areas

  • Materials Science(all)

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