Energy saving in semiconductor fabs by out-air handling unit performance improvement

Hirokazu Suzuki, Hideo Hanaoka, Yoshinori Ohkubo, Yoshio Yamazaki, Yasuyuki Shirai, Tadahiro Ohmi

Research output: Contribution to journalConference articlepeer-review

10 Citations (Scopus)

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Engineering & Materials Science

Chemical Compounds