Energy control of neutral oxygen particles passing through an aperture electrode

Takeo Ohno, Daiki Nakayama, Takeru Okada, Seiji Samukawa

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

The kinetic energy of neutralized oxygen particles passing through an aperture electrode was measured by a quadrupole mass spectrometer. The peak energy position was controlled by changing the plasma source power, acceleration bias power, and gas pressure in the vacuum chamber.

Original languageEnglish
Pages (from-to)169-171
Number of pages3
JournalResults in Physics
Volume8
DOIs
Publication statusPublished - 2018 Mar

Keywords

  • Beam energy
  • Neutralized plasma particle
  • Oxygen plasma

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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