Encapsulated micro mechanical sensors

Masayoshi Esashi

Research output: Contribution to journalArticlepeer-review

65 Citations (Scopus)

Abstract

Encapsulated micro mechanical sensors were fabricated using glass-silicon anodic bonding and an electrical feedthrough structure. Two parallel plates which can be used not only for capacitive sensors but also electrostatic actuators are adopted for integrated sensors as capacitive pressure sensors, accelerometers and resonating sensors. Micromachining technologies were developed for these packaged micro sensors. These include silicon etching technologies as laser assisted etching, deep RIE and in-process thickness monitoring during wet etching. Anodic bonding technologies which enable to incorporate a circuit inside the package and to keep a sealed cavity at a high vacuum are also developed.

Original languageEnglish
Pages (from-to)2-9
Number of pages8
JournalMicrosystem Technologies
Volume1
Issue number1
DOIs
Publication statusPublished - 1994 Oct 1

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Hardware and Architecture
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Encapsulated micro mechanical sensors'. Together they form a unique fingerprint.

Cite this