Empirical potential approach to the formation of 3C-SiC/Si(110)

Tomonori Ito, Toru Kanno, Toru Akiyama, Kohji Nakamura, Atsushi Konno, Maki Suemitsu

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

The formation of 3C-SiC/Si(110) is theoretically investigated using empirical interatomic potentials. The calculated system energies reveal that 3C-SiC(110)/Si(110) with one misfit dislocation (MD) is the most stable for the film thicknesses less than 2 monolayers (MLs), while the 3C-SiC(111)/Si(110) appears from 3 to 8 MLs. Furthermore, 3C-SiC(111) with 2.5° vicinal angle becomes the most stable beyond 9 MLs. The formation of 3C-SiC(111 )/Si(110) results from the energy profit in thin film layers due to lattice-matching between 3C-SiC(111) and Si(110), which overwhelms the energy deficit caused by large difference in coordination number at the interface between them with different orientation.

Original languageEnglish
Pages (from-to)1112011-1112013
Number of pages3
JournalApplied Physics Express
Volume1
Issue number11
DOIs
Publication statusPublished - 2008 Nov 1

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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