Glow discharge sputtering of Ag-Cu alloy surfaces was studied by optical emission spectrometry. The change In the intensity ratio between Ag and Cu emission lines was monitored during the course of sputtering. The metallurgical structures (fine particles of the eutectoid and coarse grains of the primary crystallites) played an Important role In determining the length of transition periods before steady-state sputtering. A reduction In the overall sputtering yields with sputter time, probably due to the coating of Cu atoms onto the Ag grains, was also observed.
ASJC Scopus subject areas
- Analytical Chemistry