Emission Spectroscopic Studies of Sputtering on Silver-Copper Alloy Surfaces

Kazuaki Wagatsuma; Kichinosuke Hirokawa

doi:10.1021/ac00297a029

Emission Spectroscopic Studies of Sputtering on Silver-Copper Alloy Surfaces

Kazuaki Wagatsuma, Kichinosuke Hirokawa

Materials Processing and Characterization Division

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

Glow discharge sputtering of Ag-Cu alloy surfaces was studied by optical emission spectrometry. The change In the intensity ratio between Ag and Cu emission lines was monitored during the course of sputtering. The metallurgical structures (fine particles of the eutectoid and coarse grains of the primary crystallites) played an Important role In determining the length of transition periods before steady-state sputtering. A reduction In the overall sputtering yields with sputter time, probably due to the coating of Cu atoms onto the Ag grains, was also observed.

Original language	English
Pages (from-to)	1112-1115
Number of pages	4
Journal	Analytical Chemistry
Volume	58
Issue number	6
DOIs	https://doi.org/10.1021/ac00297a029
Publication status	Published - 1986 Jan 1

ASJC Scopus subject areas

Analytical Chemistry

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10.1021/ac00297a029

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title = "Emission Spectroscopic Studies of Sputtering on Silver-Copper Alloy Surfaces",

abstract = "Glow discharge sputtering of Ag-Cu alloy surfaces was studied by optical emission spectrometry. The change In the intensity ratio between Ag and Cu emission lines was monitored during the course of sputtering. The metallurgical structures (fine particles of the eutectoid and coarse grains of the primary crystallites) played an Important role In determining the length of transition periods before steady-state sputtering. A reduction In the overall sputtering yields with sputter time, probably due to the coating of Cu atoms onto the Ag grains, was also observed.",

author = "Kazuaki Wagatsuma and Kichinosuke Hirokawa",

year = "1986",

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doi = "10.1021/ac00297a029",

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AU - Wagatsuma, Kazuaki

AU - Hirokawa, Kichinosuke

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Y1 - 1986/1/1

N2 - Glow discharge sputtering of Ag-Cu alloy surfaces was studied by optical emission spectrometry. The change In the intensity ratio between Ag and Cu emission lines was monitored during the course of sputtering. The metallurgical structures (fine particles of the eutectoid and coarse grains of the primary crystallites) played an Important role In determining the length of transition periods before steady-state sputtering. A reduction In the overall sputtering yields with sputter time, probably due to the coating of Cu atoms onto the Ag grains, was also observed.

AB - Glow discharge sputtering of Ag-Cu alloy surfaces was studied by optical emission spectrometry. The change In the intensity ratio between Ag and Cu emission lines was monitored during the course of sputtering. The metallurgical structures (fine particles of the eutectoid and coarse grains of the primary crystallites) played an Important role In determining the length of transition periods before steady-state sputtering. A reduction In the overall sputtering yields with sputter time, probably due to the coating of Cu atoms onto the Ag grains, was also observed.

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Emission Spectroscopic Studies of Sputtering on Silver-Copper Alloy Surfaces

Abstract

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