Emission characteristics of high-powered microwave induced plasma optical emission spectrometry by using nitrogen-oxygen mixture gas

Tetsuo Maeda, Kazuaki Wagatsuma

Research output: Contribution to journalArticlepeer-review

16 Citations (Scopus)

Abstract

A high-powered, microwave-induced nitrogen-oxygen plasma (N 2-O2-MIP) generated by using an Okamoto cavity at atmospheric pressure was investigated when the observation height, the flow rate of carrier gas, and the oxygen content were varied as the experimental parameters. The emission characteristics of the plasma were evaluated with regard to the excitation temperature and the intensity ratio of atomic line to ionic line. The excitation temperature of the N2-O2-MIP was in the range of 5100-5700 K when the oxygen content was varied from 0 to 30% at the observation height of 7 mm and the carrier gas flow rate of 0.6 l/min. The intensity ratio of atomic line to ionic line was elevated with an increase in the oxygen content.

Original languageEnglish
Pages (from-to)53-60
Number of pages8
JournalMicrochemical Journal
Volume76
Issue number1-2
DOIs
Publication statusPublished - 2004 Feb 1

Keywords

  • Excitation temperature
  • Intensity ratio of atomic line to ionic line
  • Microwave induced plasma
  • Okamoto cavity

ASJC Scopus subject areas

  • Analytical Chemistry
  • Spectroscopy

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