Elucidation of mechanical polishing mechanism controlled by chemical reaction: Quantum chemical molecular dynamics simulation and first-principles calculation

Nobuki Ozawa, Kentaro Kawaguchi, Momoji Kubo

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)616-621
Number of pages6
JournalToraibarojisuto/Journal of Japanese Society of Tribologists
Volume58
Issue number9
Publication statusPublished - 2013 Nov 29

Keywords

  • Chemical mechanical polishing
  • Chemical reaction
  • First-principles calculation
  • Tight-binding quantum chemical molecular dynamics
  • Tribology simulation

ASJC Scopus subject areas

  • Mechanics of Materials
  • Mechanical Engineering
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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