Elementary gas-phase reactions of radical species during chemical vapor deposition of silicon carbide using CH3SiCl3

Noboru Sato, Yuichi Funato, Kohei Shima, Hidetoshi Sugiura, Yasuyuki Fukushima, Takeshi Momose, Mitsuo Koshi, Yukihiro Shimogaki

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2 Citations (Scopus)

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Medicine & Life Sciences

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Chemical Compounds