Electrostatically switchable microprobe for mass-analysis scanning force microscopy

Chuan Yu Shao, Yusuke Kawai, Masayoshi Esashi, Takahito Ono

Research output: Contribution to journalArticle

Abstract

Mass-analysis scanning force microscopy is a kind of scanning force microscope (SFM) family, which equiped with a time-of-flight mass analyzer (TOF-MA). This microscopy will provide capability of surface imaging and chemical analysis, simultaneously. This letter presents microprobes with an electrostatic actuator to switch the measurement modes between surface imaging mode and mass analysis mode. Silicon cantilever, extranction electrode and electrosatic actuator with curved electrodes are fabricated on a Prexy glass. The cantilever is drived by stepwise pull-in phenomena. A large displacement of the cantilever can be obtained by the electrostatic actuation. Handling and releasing of latex beads are demonstrated using this probe.

Original languageEnglish
Pages (from-to)59-60
Number of pages2
JournalIEEJ Transactions on Sensors and Micromachines
Volume130
Issue number2
DOIs
Publication statusPublished - 2010 Mar 19

Keywords

  • Electrostatic actuator
  • Manipulation
  • Pull-in effect
  • Time-of-flight mass analyzer scanning force microscopy

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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