TY - JOUR
T1 - Electrostatically levitated spherical 3-axis accelerometer
AU - Toda, Risaku
AU - Takeda, Nobuo
AU - Murakoshi, Takao
AU - Nakamura, Shigeru
AU - Esashi, Masayoshi
N1 - Copyright:
Copyright 2017 Elsevier B.V., All rights reserved.
PY - 2002
Y1 - 2002
N2 - MEMS-based electrostatically levitated spherical 3-axis accelerometer has been developed. Fabrication of the spherical MEMS device is made possible by incorporating Ball Semiconductor technology and a novel sacrificial etching process utilizing xenon difluoride gas etching through gas permeable layer. 1-millimeter diameter spherical proof mass is completely suspended without any mechanical support by closed-loop controlled electrostatic forcers. 3-axis acceleration is derived from intensity of servo feedback between capacitive position sensing and the electrostatic actuation. Noise floor is estimated as 40μG/Hz1/2 level. After calibrating geometrical misalignment, scale factor and zero-G offset errors, linear output with minimal cross-axis error is obtained.
AB - MEMS-based electrostatically levitated spherical 3-axis accelerometer has been developed. Fabrication of the spherical MEMS device is made possible by incorporating Ball Semiconductor technology and a novel sacrificial etching process utilizing xenon difluoride gas etching through gas permeable layer. 1-millimeter diameter spherical proof mass is completely suspended without any mechanical support by closed-loop controlled electrostatic forcers. 3-axis acceleration is derived from intensity of servo feedback between capacitive position sensing and the electrostatic actuation. Noise floor is estimated as 40μG/Hz1/2 level. After calibrating geometrical misalignment, scale factor and zero-G offset errors, linear output with minimal cross-axis error is obtained.
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U2 - 10.1109/MEMSYS.2002.984369
DO - 10.1109/MEMSYS.2002.984369
M3 - Article
AN - SCOPUS:0036120867
SP - 710
EP - 712
JO - Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
JF - Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
SN - 1084-6999
ER -