Electrostatically levitated spherical 3-axis accelerometer

Risaku Toda, Nobuo Takeda, Takao Murakoshi, Shigeru Nakamura, Masayoshi Esashi

Research output: Contribution to journalArticlepeer-review

67 Citations (Scopus)


MEMS-based electrostatically levitated spherical 3-axis accelerometer has been developed. Fabrication of the spherical MEMS device is made possible by incorporating Ball Semiconductor technology and a novel sacrificial etching process utilizing xenon difluoride gas etching through gas permeable layer. 1-millimeter diameter spherical proof mass is completely suspended without any mechanical support by closed-loop controlled electrostatic forcers. 3-axis acceleration is derived from intensity of servo feedback between capacitive position sensing and the electrostatic actuation. Noise floor is estimated as 40μG/Hz1/2 level. After calibrating geometrical misalignment, scale factor and zero-G offset errors, linear output with minimal cross-axis error is obtained.

Original languageEnglish
Pages (from-to)710-712
Number of pages3
JournalProceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
Publication statusPublished - 2002

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering
  • Control and Systems Engineering


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