Electrostatically-controlled, self-pneumatically-actuated microvalve with high pressure tolerance and low pressure loss

D. Satoh, S. Tanaka, M. Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper describes a microvalve to control liquefied gas in a micro fuel reforming system. To realize both high pressure leak tolerance and low pressure loss, a main valve is pneumatically actuated by the pressure of the liquefied gas itself, and its pneumatic actuation is controlled by two electrostatic sub-valves. The fabricated microvalve was tested in terms of pressure loss in open state, leakage in close state and driving voltage. The pressure loss was less than 10 Pa/sccm, which is sufficiently low for the application. The apparent leakage was not detected until the input pressure reaches 150 kPa gauge. The driving voltage of the sub-valve was 40 V.

Original languageEnglish
Title of host publication19th IEEE International Conference on Micro Electro Mechanical Systems
Pages746-749
Number of pages4
Publication statusPublished - 2006 Oct 24
Event19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey
Duration: 2006 Jan 222006 Jan 26

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2006
ISSN (Print)1084-6999

Other

Other19th IEEE International Conference on Micro Electro Mechanical Systems
CountryTurkey
CityIstanbul
Period06/1/2206/1/26

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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