Electrostatic servo system for multi-axis accelerometers

Keiji Jono, Masato Hashimoto, Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

9 Citations (Scopus)


A multi-axis capacitive accelerometer, using an electrostatic servo system was developed. In this system, an acceleration in three axes (X,Y,Z) is decomposed into its axial components independently and simultaneously by using the synchronous demodulation. The problem of off-axis response was solved by using the electrostatic force balancing to keep the seismic mass in the original position. Typical results achieved for off-axis sensitivity were 1.3-7.3%.

Original languageEnglish
Title of host publicationAn Investigations of Micro Structures, Sensors, Actuators, Machines and Robotic Systems
PublisherPubl by IEEE
Number of pages6
ISBN (Print)078031834X
Publication statusPublished - 1994 Jan 1
EventProceedings of the IEEE Micro Electro Mechanical Systems - Oiso, Jpn
Duration: 1994 Jan 251994 Jan 28


OtherProceedings of the IEEE Micro Electro Mechanical Systems
CityOiso, Jpn

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering


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