An uncooled infrared sensor is fabricated with the structure of a bimetallic cantilever. A NiCr(80:20) film is formed on the cantilever. The NiCr film absorbs infrared radiation and causes the cantilever to bend by the thermal bimetallic effect. In this device, a tunneling current displacement transducer is employed to detect the deflection of the bimetallic structure. The detection is achieved by electrostatic servo feedback control and the tunneling gap is kept contant during the infrared irradiation. The absorbed infrared is measured by the feedback signal. In this paper, not only the sensor performance and feedback control but also basic characteristics such as electrostatic actuation and bimetallic displacement due to infrared absorption are estimated and discussed.
|Number of pages||14|
|Journal||Sensors and Materials|
|Publication status||Published - 2000 Dec 1|
- Electrostatic control
- Tunneling current
ASJC Scopus subject areas
- Materials Science(all)