In this paper, a new mechanism of an electrostatic micromanipulator which has 6 D.O.F is proposed. Its main features are summarized as follows. First it can be constructed very compact, since the actuator system is fabricated and assembled through the photoetching process. Second it can move along three axes (6 D.O.F), and rotate around each axis and has high resolution with no backlash. In the experiments, movable range of 3.15 micron and rotatable angle of 1.1×10-2 degree are attained with applied voltage of 350V. A simulation result for dynamics is shown to estimate the motion of the micromanipulator.