Electrostatic micro manipulator with 6 D.O.F

Toshio Fukuda, Motohiro Fujiyoshi, Kazuhiro Kosuge, Fumihito Arai

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)


In this paper, a new mechanism of an electrostatic micromanipulator which has 6 D.O.F is proposed. Its main features are summarized as follows. First it can be constructed very compact, since the actuator system is fabricated and assembled through the photoetching process. Second it can move along three axes (6 D.O.F), and rotate around each axis and has high resolution with no backlash. In the experiments, movable range of 3.15 micron and rotatable angle of 1.1×10-2 degree are attained with applied voltage of 350V. A simulation result for dynamics is shown to estimate the motion of the micromanipulator.

Original languageEnglish
Title of host publicationIntelligence for Mechanical Systems
Number of pages6
ISBN (Print)078030067X
Publication statusPublished - 1991 Dec 1
Externally publishedYes
EventIEEE/RSJ International Workshop on Intelligent Robot and Systems '91 -
Duration: 1991 Nov 31991 Nov 5

Publication series

NameIntelligence for Mechanical Systems


OtherIEEE/RSJ International Workshop on Intelligent Robot and Systems '91

ASJC Scopus subject areas

  • Engineering(all)


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