Electrostatic actuator with segmented comb electrodes

Minoru Sasaki, Fuminori Bono, Kazuhiro Hane

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

The comb drive actuator with segmented electrodes is fabricated for realizing the large displacement. The counter torque generated by applying the higher driving voltage at a segmented electrode can suppress the instability, called "side snap-over". The stable travel is confirmed to extend by 4-6μm. The obtained maximum displacement is 50μm.

Original languageEnglish
Pages (from-to)168-169
Number of pages2
JournalIEEJ Transactions on Sensors and Micromachines
Volume126
Issue number4
DOIs
Publication statusPublished - 2006

Keywords

  • Comb drive actuator
  • Side snap-over

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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