The comb drive actuator with segmented electrodes is fabricated for realizing the large displacement. The counter torque generated by applying the higher driving voltage at a segmented electrode can suppress the instability, called "side snap-over". The stable travel is confirmed to extend by 4-6μm. The obtained maximum displacement is 50μm.
- Comb drive actuator
- Side snap-over
ASJC Scopus subject areas
- Mechanical Engineering
- Electrical and Electronic Engineering