Electrostatic actuator integrated optical near-field probe with bow-tie antenna for high transmission efficiency

K. Iwami; T. Ono; E. Oesterschulze; M. Esashi

doi:10.1109/SENSOR.2003.1215375

Electrostatic actuator integrated optical near-field probe with bow-tie antenna for high transmission efficiency

K. Iwami, T. Ono, E. Oesterschulze, M. Esashi

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Citations (Scopus)

Abstract

In this paper, we report on the design and fabrication of an optical near-field probe in which an electrostatic actuator and a bow-tie antenna for the enhancement and modulation of an optical near-field are integrated. The bow-tie antenna consists of two triangular electrodes opposed with narrow a gap. The gap spacing of the bow-tie antenna can be adjusted by the electrostatic actuator, which offers both the small spot size of the optical near-field and the high transmission efficiency. The actuation of the fabricated probe is examined, and the optical modulation of an incident laser light is demonstrated.

Original language	English
Title of host publication	TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	548-551
Number of pages	4
ISBN (Electronic)	0780377311, 9780780377318
DOIs	https://doi.org/10.1109/SENSOR.2003.1215375
Publication status	Published - 2003 Jan 1
Event	12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States Duration: 2003 Jun 8 → 2003 Jun 12

Publication series

Name	TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Volume	1

Other

Other	12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
Country/Territory	United States
City	Boston
Period	03/6/8 → 03/6/12

Keywords

Apertures
Biomedical optical imaging
Electrostatic actuators
Integrated optics
Optical modulation
Optical scattering
Optical surface waves
Probes
Throughput
Transmitting antennas

ASJC Scopus subject areas

Electrical and Electronic Engineering

Access to Document

10.1109/SENSOR.2003.1215375

Cite this

Iwami, K., Ono, T., Oesterschulze, E., & Esashi, M. (2003). Electrostatic actuator integrated optical near-field probe with bow-tie antenna for high transmission efficiency. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers (pp. 548-551). [1215375] (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers; Vol. 1). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SENSOR.2003.1215375

Electrostatic actuator integrated optical near-field probe with bow-tie antenna for high transmission efficiency. / Iwami, K.; Ono, T.; Oesterschulze, E. et al.

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc., 2003. p. 548-551 1215375 (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers; Vol. 1).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Iwami, K, Ono, T, Oesterschulze, E & Esashi, M 2003, Electrostatic actuator integrated optical near-field probe with bow-tie antenna for high transmission efficiency. in TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers., 1215375, TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers, vol. 1, Institute of Electrical and Electronics Engineers Inc., pp. 548-551, 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers, Boston, United States, 03/6/8. https://doi.org/10.1109/SENSOR.2003.1215375

Iwami K, Ono T, Oesterschulze E, Esashi M. Electrostatic actuator integrated optical near-field probe with bow-tie antenna for high transmission efficiency. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc. 2003. p. 548-551. 1215375. (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers). doi: 10.1109/SENSOR.2003.1215375

Iwami, K. ; Ono, T. ; Oesterschulze, E. et al. / Electrostatic actuator integrated optical near-field probe with bow-tie antenna for high transmission efficiency. TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc., 2003. pp. 548-551 (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers).

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Electrostatic actuator integrated optical near-field probe with bow-tie antenna for high transmission efficiency

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