Electrostatic actuator integrated optical near-field probe with bow-tie antenna for high transmission efficiency

K. Iwami, T. Ono, E. Oesterschulze, M. Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

In this paper, we report on the design and fabrication of an optical near-field probe in which an electrostatic actuator and a bow-tie antenna for the enhancement and modulation of an optical near-field are integrated. The bow-tie antenna consists of two triangular electrodes opposed with narrow a gap. The gap spacing of the bow-tie antenna can be adjusted by the electrostatic actuator, which offers both the small spot size of the optical near-field and the high transmission efficiency. The actuation of the fabricated probe is examined, and the optical modulation of an incident laser light is demonstrated.

Original languageEnglish
Title of host publicationTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages548-551
Number of pages4
ISBN (Electronic)0780377311, 9780780377318
DOIs
Publication statusPublished - 2003 Jan 1
Event12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States
Duration: 2003 Jun 82003 Jun 12

Publication series

NameTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Volume1

Other

Other12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
CountryUnited States
CityBoston
Period03/6/803/6/12

Keywords

  • Apertures
  • Biomedical optical imaging
  • Electrostatic actuators
  • Integrated optics
  • Optical modulation
  • Optical scattering
  • Optical surface waves
  • Probes
  • Throughput
  • Transmitting antennas

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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