Electron-temperature control for plasmas passing through a negatively biased grid

Kohgi Kato, Satoru Iizuka, Noriyoshi Sato

Research output: Contribution to journalArticlepeer-review

74 Citations (Scopus)

Abstract

Electron-temperature control is performed on plasmas passing through a coarse mesh grid from a discharge region. By increasing a negative potential applied to the grid, the electron temperature is continuously decreased in a very wide range covering almost two orders of magnitude down to the value nearly equal to the background gas temperature in case of direct current argon or helium gas discharge. The temperature decrease is accompanied by an increase in the electron density. This method of electron-temperature control can also be applied to plasmas produced by radio-frequency and electron cyclotron resonance discharges.

Original languageEnglish
Pages (from-to)816-818
Number of pages3
JournalApplied Physics Letters
Volume65
Issue number7
DOIs
Publication statusPublished - 1994 Dec 1

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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