Electron temperature control by varying size of slits made in a grid

Kohgi Kato, Tetsuji Shimizu, Satoru Iizuka, Noriyoshi Sato

Research output: Contribution to journalArticlepeer-review

43 Citations (Scopus)

Abstract

Electron temperature is controlled by varying the length of slits made in a grid immersed in a weakly ionized discharge plasma. The grid, which is kept at floating potential, has six slits in this experiment. With a decrease in the slit length from 6 to 0 cm, the electron temperature decreases from 2.1 to 0.09 eV, being accompanied by an electron-density increase from 0.32×109 to 1.53 ×109 cm-3 at argon gas pressure of 1.5 mTorr. This method of electron-temperature control is applicable to reactive plasmas in which grids are often covered by insulators.

Original languageEnglish
Pages (from-to)547-549
Number of pages3
JournalApplied Physics Letters
Volume76
Issue number5
DOIs
Publication statusPublished - 2000 Jan 31

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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