Electron temperature is controlled by varying the length of slits made in a grid immersed in a weakly ionized discharge plasma. The grid, which is kept at floating potential, has six slits in this experiment. With a decrease in the slit length from 6 to 0 cm, the electron temperature decreases from 2.1 to 0.09 eV, being accompanied by an electron-density increase from 0.32×109 to 1.53 ×109 cm-3 at argon gas pressure of 1.5 mTorr. This method of electron-temperature control is applicable to reactive plasmas in which grids are often covered by insulators.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)