Electron temperature control by varying size of slits made in a grid

Kohgi Kato; Tetsuji Shimizu; Satoru Iizuka; Noriyoshi Sato

doi:10.1063/1.125814

Electron temperature control by varying size of slits made in a grid

Kohgi Kato, Tetsuji Shimizu, Satoru Iizuka, Noriyoshi Sato

ENG - Electrical Engineering

Research output: Contribution to journal › Article › peer-review

43 Citations (Scopus)

Abstract

Electron temperature is controlled by varying the length of slits made in a grid immersed in a weakly ionized discharge plasma. The grid, which is kept at floating potential, has six slits in this experiment. With a decrease in the slit length from 6 to 0 cm, the electron temperature decreases from 2.1 to 0.09 eV, being accompanied by an electron-density increase from 0.32×10⁹ to 1.53 ×10⁹ cm^-3 at argon gas pressure of 1.5 mTorr. This method of electron-temperature control is applicable to reactive plasmas in which grids are often covered by insulators.

Original language	English
Pages (from-to)	547-549
Number of pages	3
Journal	Applied Physics Letters
Volume	76
Issue number	5
DOIs	https://doi.org/10.1063/1.125814
Publication status	Published - 2000 Jan 31

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

Access to Document

10.1063/1.125814

Cite this

@article{4a5f39b6925c4e98aec301a3f86f473f,

title = "Electron temperature control by varying size of slits made in a grid",

abstract = "Electron temperature is controlled by varying the length of slits made in a grid immersed in a weakly ionized discharge plasma. The grid, which is kept at floating potential, has six slits in this experiment. With a decrease in the slit length from 6 to 0 cm, the electron temperature decreases from 2.1 to 0.09 eV, being accompanied by an electron-density increase from 0.32×109 to 1.53 ×109 cm-3 at argon gas pressure of 1.5 mTorr. This method of electron-temperature control is applicable to reactive plasmas in which grids are often covered by insulators.",

author = "Kohgi Kato and Tetsuji Shimizu and Satoru Iizuka and Noriyoshi Sato",

year = "2000",

month = jan,

day = "31",

doi = "10.1063/1.125814",

language = "English",

volume = "76",

pages = "547--549",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics Publising LLC",

number = "5",

}

TY - JOUR

T1 - Electron temperature control by varying size of slits made in a grid

AU - Kato, Kohgi

AU - Shimizu, Tetsuji

AU - Iizuka, Satoru

AU - Sato, Noriyoshi

PY - 2000/1/31

Y1 - 2000/1/31

N2 - Electron temperature is controlled by varying the length of slits made in a grid immersed in a weakly ionized discharge plasma. The grid, which is kept at floating potential, has six slits in this experiment. With a decrease in the slit length from 6 to 0 cm, the electron temperature decreases from 2.1 to 0.09 eV, being accompanied by an electron-density increase from 0.32×109 to 1.53 ×109 cm-3 at argon gas pressure of 1.5 mTorr. This method of electron-temperature control is applicable to reactive plasmas in which grids are often covered by insulators.

AB - Electron temperature is controlled by varying the length of slits made in a grid immersed in a weakly ionized discharge plasma. The grid, which is kept at floating potential, has six slits in this experiment. With a decrease in the slit length from 6 to 0 cm, the electron temperature decreases from 2.1 to 0.09 eV, being accompanied by an electron-density increase from 0.32×109 to 1.53 ×109 cm-3 at argon gas pressure of 1.5 mTorr. This method of electron-temperature control is applicable to reactive plasmas in which grids are often covered by insulators.

UR - http://www.scopus.com/inward/record.url?scp=0000856131&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0000856131&partnerID=8YFLogxK

U2 - 10.1063/1.125814

DO - 10.1063/1.125814

M3 - Article

AN - SCOPUS:0000856131

VL - 76

SP - 547

EP - 549

JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

IS - 5

ER -

Electron temperature control by varying size of slits made in a grid

Abstract

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this