Abstract
Electron temperature is controlled by varying the length of slits made in a grid immersed in a weakly ionized discharge plasma. The grid, which is kept at floating potential, has six slits in this experiment. With a decrease in the slit length from 6 to 0 cm, the electron temperature decreases from 2.1 to 0.09 eV, being accompanied by an electron-density increase from 0.32×109 to 1.53 ×109 cm-3 at argon gas pressure of 1.5 mTorr. This method of electron-temperature control is applicable to reactive plasmas in which grids are often covered by insulators.
Original language | English |
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Pages (from-to) | 547-549 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 76 |
Issue number | 5 |
DOIs | |
Publication status | Published - 2000 Jan 31 |
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)