Electron temperature control by varying size of slits made in a grid

Kohgi Kato; Tetsuji Shimizu; Satoru Iizuka; Noriyoshi Sato

doi:10.1063/1.125814

Electron temperature control by varying size of slits made in a grid

Kohgi Kato, Tetsuji Shimizu, Satoru Iizuka, Noriyoshi Sato

ENG - Electrical Engineering

Research output: Contribution to journal › Article › peer-review

46 Citations (Scopus)

Abstract

Electron temperature is controlled by varying the length of slits made in a grid immersed in a weakly ionized discharge plasma. The grid, which is kept at floating potential, has six slits in this experiment. With a decrease in the slit length from 6 to 0 cm, the electron temperature decreases from 2.1 to 0.09 eV, being accompanied by an electron-density increase from 0.32×10⁹ to 1.53 ×10⁹ cm^-3 at argon gas pressure of 1.5 mTorr. This method of electron-temperature control is applicable to reactive plasmas in which grids are often covered by insulators.

Original language	English
Pages (from-to)	547-549
Number of pages	3
Journal	Applied Physics Letters
Volume	76
Issue number	5
DOIs	https://doi.org/10.1063/1.125814
Publication status	Published - 2000 Jan 31

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.125814

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abstract = "Electron temperature is controlled by varying the length of slits made in a grid immersed in a weakly ionized discharge plasma. The grid, which is kept at floating potential, has six slits in this experiment. With a decrease in the slit length from 6 to 0 cm, the electron temperature decreases from 2.1 to 0.09 eV, being accompanied by an electron-density increase from 0.32×109 to 1.53 ×109 cm-3 at argon gas pressure of 1.5 mTorr. This method of electron-temperature control is applicable to reactive plasmas in which grids are often covered by insulators.",

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AU - Kato, Kohgi

AU - Shimizu, Tetsuji

AU - Iizuka, Satoru

AU - Sato, Noriyoshi

PY - 2000/1/31

Y1 - 2000/1/31

N2 - Electron temperature is controlled by varying the length of slits made in a grid immersed in a weakly ionized discharge plasma. The grid, which is kept at floating potential, has six slits in this experiment. With a decrease in the slit length from 6 to 0 cm, the electron temperature decreases from 2.1 to 0.09 eV, being accompanied by an electron-density increase from 0.32×109 to 1.53 ×109 cm-3 at argon gas pressure of 1.5 mTorr. This method of electron-temperature control is applicable to reactive plasmas in which grids are often covered by insulators.

AB - Electron temperature is controlled by varying the length of slits made in a grid immersed in a weakly ionized discharge plasma. The grid, which is kept at floating potential, has six slits in this experiment. With a decrease in the slit length from 6 to 0 cm, the electron temperature decreases from 2.1 to 0.09 eV, being accompanied by an electron-density increase from 0.32×109 to 1.53 ×109 cm-3 at argon gas pressure of 1.5 mTorr. This method of electron-temperature control is applicable to reactive plasmas in which grids are often covered by insulators.

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SN - 0003-6951

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Electron temperature control by varying size of slits made in a grid

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