Electron-temperature control by movable pins installed in a hollow cathode for discharge plasmas

N. Sato, S. Iizuka, T. Koizumi, T. Takada

Research output: Contribution to journalArticle

22 Citations (Scopus)

Abstract

In order to control electron energy distributions in discharge plasmas, we have developed a new hollow cathode with pins inside. With an increase in the pin length, the electron temperature is observed to decrease continuously by an order of magnitude, being accompanied by a change of local plasma structure, in weakly magnetized low-pressure Ar dc discharge plasmas.

Original languageEnglish
Pages (from-to)567-569
Number of pages3
JournalApplied Physics Letters
Volume62
Issue number6
DOIs
Publication statusPublished - 1993 Dec 1

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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