Abstract
The basic properties of the control of electron temperature and ion energy in modified magnetron-typed (MMT) radio-frequency (RF) plasma are investigated by using the grid and double-plasma methods, respectively. By changing the open area of the slots situated on a cylindrical grid, the electron temperature in the center region is controlled continuously in the range from 0.5 to 2.4 eV. On the other hand, by changing the plasma potential of an ion-beam source, we control the ion energy from 0 to 30 eV.
| Original language | English |
|---|---|
| Pages (from-to) | 248-251 |
| Number of pages | 4 |
| Journal | Thin Solid Films |
| Volume | 386 |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - 2001 May 15 |
| Event | 12th Symposium on Plasma Science for Materials - Tokyo, Japan Duration: 2001 Jun 16 → 2001 Jun 17 |
Keywords
- Double-plasma method
- Electron temperature control
- Grid method
- Ion energy control
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Metals and Alloys
- Materials Chemistry