Electron temperature and ion energy control in modified magnetron-typed RF discharge

T. Shimizu, K. Kato, Y. Li, S. Iizuka, N. Sato

Research output: Contribution to journalConference articlepeer-review

3 Citations (Scopus)

Abstract

The basic properties of the control of electron temperature and ion energy in modified magnetron-typed (MMT) radio-frequency (RF) plasma are investigated by using the grid and double-plasma methods, respectively. By changing the open area of the slots situated on a cylindrical grid, the electron temperature in the center region is controlled continuously in the range from 0.5 to 2.4 eV. On the other hand, by changing the plasma potential of an ion-beam source, we control the ion energy from 0 to 30 eV.

Original languageEnglish
Pages (from-to)248-251
Number of pages4
JournalThin Solid Films
Volume386
Issue number2
DOIs
Publication statusPublished - 2001 May 15
Event12th Symposium on Plasma Science for Materials - Tokyo, Japan
Duration: 2001 Jun 162001 Jun 17

Keywords

  • Double-plasma method
  • Electron temperature control
  • Grid method
  • Ion energy control

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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