Electron energy distributions in inductively coupled plasma: Comparison of chlorine discharge with argon discharge

Shigeru Yonemura, Kenichi Nanbu, Kazuma Sakai

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)

Abstract

The characteristics of the electron energy distribution functions (EEDFs) in inductively-coupled discharges of chlorine and argon gases are studied numerically. The EEDFs in atomic gases such as Ar and Cl show the three-temperature distribution with depletion in the high-energy region and enhancement in the low-energy region. By contrast, the EEDF for Cl2 shows the bi-Maxwellian distribution close to the Maxwellian one. The reason for this difference is explained by the difference of electronic inelastic collision cross sections between atomic and molecular gases. The EEDFs obtained in the present simulation agree with the earlier experimental results qualitatively.

Original languageEnglish
Pages (from-to)6189-6196
Number of pages8
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume41
Issue number10
Publication statusPublished - 2002 Oct 1

Keywords

  • Argon plasma
  • Chlorine plasma
  • Electron energy distribution
  • Inductively coupled plasma
  • Particle-in-cell/Monte Carlo method

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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