Electron Cyclotron Resonance Devices with Permanent Magnets for Production of Large-Diameter Uniform Plasmas

Satoru Iizuka, Noriyoshi Sato

Research output: Contribution to journalArticle

17 Citations (Scopus)

Abstract

A review is presented of experimental devices with permanent magnets for electron cyclotron resonance to produce large-diameter uniform plasmas. The devices are classified into 7 groups depending on device symmetry, magnet arrangement, plasma-drift direction and microwave coupling. Their characteristic points are clarified and the most optimal device construction and arrangement are discussed from a viewpoint of producing uniform plasmas necessary for large-scale plasma processing.

Original languageEnglish
Number of pages1
JournalJapanese journal of applied physics
Volume33
Issue number7S
DOIs
Publication statusPublished - 1994 Jul

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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