Electromechanical field concentrations near electrodes in piezoelectric MEMS mirrors

Yasuhide Shindo, Fumio Narita, Koji Sato

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper studies the electromechanical response of piezoelectric MEMS mirrors driven by PZT thin films. The MEMS mirrors consisted of four partially or fully poled PZT unimorphs. The resonance frequency and mirror tilt angle of piezoelectric MEMS mirrors under AC electric fields were analyzed by three dimensional finite element method. The electromechanical field concentrations due to electrodes were also simulated, and the results were discussed in detail.

Original languageEnglish
Title of host publicationAdvances and Trends in Engineering Materials and their Applications - Proceedings of AES-ATEMA'2011 9th International Conference
Pages293-298
Number of pages6
Publication statusPublished - 2011 Dec 1
Event9th International Conference on Advances and Trends in Engineering Materials and their Applications, AES-ATEMA'2011 - Montreal, QC, Canada
Duration: 2011 Aug 12011 Aug 5

Other

Other9th International Conference on Advances and Trends in Engineering Materials and their Applications, AES-ATEMA'2011
CountryCanada
CityMontreal, QC
Period11/8/111/8/5

Keywords

  • Electromechanical field concentrations
  • Finite element method
  • MEMS
  • Mesomechanics
  • Piezoelectric PZT thin films

ASJC Scopus subject areas

  • Mechanics of Materials
  • Materials Science(all)

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