Electromechanical field concentrations near electrodes in piezoelectric MEMS mirrors

Yasuhide Shindo, Fumio Narita, Koji Sato

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper studies the electromechanical response of piezoelectric MEMS mirrors driven by PZT thin films. The MEMS mirrors consisted of four partially or fully poled PZT unimorphs. The resonance frequency and mirror tilt angle of piezoelectric MEMS mirrors under AC electric fields were analyzed by three dimensional finite element method. The electromechanical field concentrations due to electrodes were also simulated, and the results were discussed in detail. The results for the evaluation of electromechanical fields in the PZT thin films may help MEMS mirror device designers to estimate the fracture risk and to optimize in-service loading conditions.

Original languageEnglish
Title of host publicationAdvances and Trends in Engineering Materials and their Applications - Proceedings of AES-ATEMA'2011 7th International Conference
Pages81-86
Number of pages6
Publication statusPublished - 2011 Dec 1
Event7th International Conference on Advances and Trends in Engineering Materials and their Applications, AES-ATEMA'2011 - Milan, Italy
Duration: 2011 Jul 42011 Jul 8

Publication series

NameAES-ATEMA International Conference Series - Advances and Trends in Engineering Materials and their Applications
ISSN (Print)1924-3642

Other

Other7th International Conference on Advances and Trends in Engineering Materials and their Applications, AES-ATEMA'2011
CountryItaly
CityMilan
Period11/7/411/7/8

Keywords

  • Electromechanical field concentrations
  • Finite element method
  • MEMS
  • Mesomechanics
  • Piezoelectric PZT thin films

ASJC Scopus subject areas

  • Mechanics of Materials
  • Materials Science(all)

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